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Synthesis and elastic properties of V2AlC thin films by magnetron sputtering from elemental targets
Sigumonrong, Darwin P.1; Zhang, Jie2,3; Zhou, Yanchun2; Music, Denis1; Schneider, Jochen M.1
Corresponding AuthorSigumonrong, Darwin P.()
2009-09-21
Source PublicationJOURNAL OF PHYSICS D-APPLIED PHYSICS
ISSN0022-3727
Volume42Issue:18Pages:8
AbstractThe influence of deposition temperature on phase formation of V2AlC is studied by magnetron sputtering from elemental targets. At substrate temperatures below 750 degrees C, we observed the formation of AlxVy and V2C using x-ray diffraction (XRD) analysis. At 750 degrees C, a phase pure polycrystalline V2AlC film on a similar to 12 nm thick transition layer has been observed using XRD and transmission electron microscopy. Selected area electron diffraction indicates that the film grown on the transition layer consists of phase pure V2AlC. As the substrate temperature is increased to 850 degrees C, the formation of V2C in addition to the V2AlC phase is observed. This may be due to desorption of aluminium causing the decomposition of V2AlC into vanadium carbides and aluminium. The V2AlC film is fully dense and polycrystalline and the elastic modulus based on nanoindentation is within the expected error margin consistent with previously reported theoretical calculations and the diamond anvil cell measurement of bulk V2AlC samples.
Funding OrganizationDeutsche Forschungsgemeinschaft (DFG)
DOI10.1088/0022-3727/42/18/185408
Indexed BySCI
Language英语
Funding ProjectDeutsche Forschungsgemeinschaft (DFG)[561]
WOS Research AreaPhysics
WOS SubjectPhysics, Applied
WOS IDWOS:000269557000051
PublisherIOP PUBLISHING LTD
Citation statistics
Cited Times:24[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/97048
Collection中国科学院金属研究所
Corresponding AuthorSigumonrong, Darwin P.
Affiliation1.Rhein Westfal TH Aachen, D-52074 Aachen, Germany
2.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat, Shenyang 110016, Peoples R China
3.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Sigumonrong, Darwin P.,Zhang, Jie,Zhou, Yanchun,et al. Synthesis and elastic properties of V2AlC thin films by magnetron sputtering from elemental targets[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2009,42(18):8.
APA Sigumonrong, Darwin P.,Zhang, Jie,Zhou, Yanchun,Music, Denis,&Schneider, Jochen M..(2009).Synthesis and elastic properties of V2AlC thin films by magnetron sputtering from elemental targets.JOURNAL OF PHYSICS D-APPLIED PHYSICS,42(18),8.
MLA Sigumonrong, Darwin P.,et al."Synthesis and elastic properties of V2AlC thin films by magnetron sputtering from elemental targets".JOURNAL OF PHYSICS D-APPLIED PHYSICS 42.18(2009):8.
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