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Preparation and thermal desorption properties of dc sputtered zirconium-hydrogen-helium thin films 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2008, 卷号: 26, 期号: 6, 页码: 1511-1518
作者:  Wei, Y. C.;  Shi, L. Q.;  Zhang, L.;  He, Z. J.;  Zhang, B.;  Wang, L. B.
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crystal microstructure  desorption  sputter deposition  surface morphology  thin films  transmission electron microscopy  X-ray diffraction  zirconium compounds