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Fabrication and investigation of tungsten deposit on top and bottom surfaces of thin film substrate 期刊论文
Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers, Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers, 2007, 2007, 卷号: 46, 46, 期号: 9B, 页码: 6254-6257, 6254-6257
作者:  Z. Q. Liu;  K. Mitsuishi;  K. Furuya
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Electron-beam-induced Deposition (Ebid)  Electron-beam-induced Deposition (Ebid)  Nanofabrication  Nanofabrication  Tungsten  Tungsten  Microstructure  Microstructure  Tem  Tem  Beam-induced Deposition  Beam-induced Deposition  Standing W-nanodendrites  Standing W-nanodendrites  Electron-microscope  Electron-microscope  Sio2 Substrate  Sio2 Substrate  Growth-rate  Growth-rate  Voltage  Voltage  Devices  Devices