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MgO SECONDARY ELECTRON EMISSION FILM PREPARED BY RADIO-FREQUENCY REACTIVE SPUTERRING 期刊论文
ACTA METALLURGICA SINICA, 2016, 卷号: 52, 期号: 1, 页码: 10-16
作者:  Wang Bin;  Xong Liangyin;  Liu Shi
收藏  |  浏览/下载：102/0  |  提交时间：2021/02/02
radio-frequency reactive sputtering  thickness of film  surface roughness  secondary electron emission coefficient  resistance to electron beam bombardment  
MgO SECONDARY ELECTRON EMISSION FILM PREPARED BY RADIO-FREQUENCY REACTIVE SPUTERRING 期刊论文
ACTA METALLURGICA SINICA, 2016, 卷号: 52, 期号: 1, 页码: 10-16
作者:  Wang Bin;  Xong Liangyin;  Liu Shi
收藏  |  浏览/下载：89/0  |  提交时间：2021/02/02
radio-frequency reactive sputtering  thickness of film  surface roughness  secondary electron emission coefficient  resistance to electron beam bombardment