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A viable approach to prepare 3C-SiC coatings by thermal MOCVD using commercial grade precursors
期刊论文
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2022, 卷号: 42, 期号: 11, 页码: 4456-4464
Authors:
Liu, Housheng
;
Tariq, Naeem ul Haq
;
Jing, Weichen
;
Cui, Xinyu
;
Tang, Mingqiang
;
Xiong, Tianying
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View/Download:42/0
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Submit date:2022/07/14
HMDSO
MOCVD
SiC
Thermal reduction
Development of hydrogen-free fully amorphous silicon oxycarbide coating by thermal organometallic chemical vapor deposition technique
期刊论文
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2022, 卷号: 575, 页码: 8
Authors:
Liu, Housheng
;
Tariq, Naeem ul Haq
;
Han, Rifei
;
Liu, Hanhui
;
Cui, Xinyu
;
Tang, Mingqiang
;
Xiong, Tianying
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View/Download:49/0
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Submit date:2021/12/09
Chemical vapor deposition
Amorphous SiOC coating
Amorphous carbon