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2014 [1]
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偏压对直流磁控溅射制备的AlB2-type WB2薄膜结构和性能的影响
会议论文
, 中国湖北武汉, 2014
Authors:
刘艳明
;
蒋春磊
;
裴志亮
;
雷浩
;
宫骏
;
孙超
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Submit date：2015/05/08
Alb2-type Wb2薄膜
直流磁控溅射
硬度
摩擦磨损
结合力
