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2016 [1]
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中文 [1]
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强激光与粒子束 [1]
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Date Issued：2016
Source Publication：强激光与粒子束
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响应面方法的硅刻蚀工艺优化分析
期刊论文
强激光与粒子束, 2016, 卷号: 28.0, 期号: 006, 页码: 064109-1
Authors:
Fu Wenting
;
Liang Qiao
;
Cui Kefu
;
Shi Tianli
;
Zhang Na
;
Zheng Dongming
;
Tang Hui
;
Sun Haiwei
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Submit date：2021/02/02
KOH各向异性
响应面分析方法
刻蚀速率
传感器
