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Conference... [1]
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2002 [1]
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中文 [1]
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《半导体学报》第24... [1]
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中国电子学会 [1]
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磁控溅射纳米PtSi薄膜表面和界面特征
会议论文
《半导体学报》第24卷 增刊第二届全国纳米技术与应用学术会议专刊, 宁波, 2002-11-28
Authors:
殷景华
;
蔡伟
;
王明光
;
郑玉峰
;
李美成
;
王培林
;
赵连城
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Submit date：2013/08/21
表面形貌
界面结构
磁控溅射方法
硅化铂
纳米薄膜
