Structural and microstructural analyses of crystalline Er2O3 high-k films grown on Si (001) by laser molecular beam epitaxy

doi:10.1016/j.actamat.2010.11.031

IMR OpenIR

	Structural and microstructural analyses of crystalline Er2O3 high-k films grown on Si (001) by laser molecular beam epitaxy
	Wang, X.1; Zhu, Y. L.1; He, M.2; Lu, H. B.2; Ma, X. L.1
通讯作者	Zhu, Y. L.(ylzhu@imr.ac.cn)
	2011-02-01
发表期刊	ACTA MATERIALIA
ISSN	1359-6454
卷号	59 期号:4 页码:1644-1650
摘要	Erbium oxide (Er2O3) films are well regarded as being suited for high-k replacement of SiO2 in endeavors to further miniaturize and enhance the performance of microelectronics. Er2O3 films were deposited on Si (0 0 1) substrates by laser molecular beam epitaxy. The structures and microstructures of the films and the interfacial layers were characterized by means of X-ray diffraction (XRD) and transmission electron microscopy (TEM). The results from the XRD and selected area electron diffractions of Er2O3 films with thicknesses of 30 and 100 nm indicate that the films are polycrystalline, with dominant (1 1 1) textures of Er2O3 (1 1 1) // Si (0 0 1). Amorphous layers dotted with small ordered islands were observed and confirmed to be located at the interfaces between the films and the Si substrates with dark-field image and high-resolution TEM. High-resolution Z-contrast imaging, energy dispersive X-ray spectroscopy and energy-filtered imaging were applied to identify the compositions of the interfacial layers. The salient feature is that the layers consist primarily of Er and O, with a very small amount of Si. This kind of Er-O-based interface layer may play a very important role in the electrical and optical properties of the films. (C) 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
关键词	Thin films High-resolution electron microscopy Energy-filtered transmission microscopy Interface Dielectrics
资助者	National Basic Research Program of China ; National Natural Science Foundation of China
DOI	10.1016/j.actamat.2010.11.031
收录类别	SCI
语种	英语
资助项目	National Basic Research Program of China[2009CB623705] ; National Natural Science Foundation of China[50871115]
WOS研究方向	Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000287265100032
出版者	PERGAMON-ELSEVIER SCIENCE LTD
引用统计	被引频次：19[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/104678
专题	中国科学院金属研究所
通讯作者	Zhu, Y. L.
作者单位	1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China 2.Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China
推荐引用方式 GB/T 7714	Wang, X.,Zhu, Y. L.,He, M.,et al. Structural and microstructural analyses of crystalline Er2O3 high-k films grown on Si (001) by laser molecular beam epitaxy[J]. ACTA MATERIALIA,2011,59(4):1644-1650.
APA	Wang, X.,Zhu, Y. L.,He, M.,Lu, H. B.,&Ma, X. L..(2011).Structural and microstructural analyses of crystalline Er2O3 high-k films grown on Si (001) by laser molecular beam epitaxy.ACTA MATERIALIA,59(4),1644-1650.
MLA	Wang, X.,et al."Structural and microstructural analyses of crystalline Er2O3 high-k films grown on Si (001) by laser molecular beam epitaxy".ACTA MATERIALIA 59.4(2011):1644-1650.