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INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING
Xiao Jinquan1; Lang Wenchang1,2; Zhao Yanhui1; Gong Jun1; Sun Chao1; Wen Lishi1
Corresponding AuthorXiao Jinquan(jqxiao@imr.ac.cn)
2011-05-11
Source PublicationACTA METALLURGICA SINICA
ISSN0412-1961
Volume47Issue:5Pages:566-572
AbstractArc ion plating (AIP) has been widely used in the deposition of various kinds of thin solid films. In AIP process, cathode spot motion is the key factor because it affects the physical characteristics of arc plasma, the utilization of cathode materials, the ejection of macroparticles (MPs) and the quality of subsequent films. It has been found that the cathode spot can be steered by an external magnetic field, such as an axisymmetric magnetic field (AMF). In this work, a new AMF produced by using an adjustable electromagnetic coil associated with a concentric magnetic flux guider was applied to the cathode surface to deposit TiN films, and it was focused on the influence of the AMP on the content and size of MPs, microstructure and friction performance of TiN films. The results show that the size and number of MPs decrease significantly with the increase in the transverse component of AMF. Meanwhile, the TiN film (111) preferred orientation enhances and its grain size decreases. Furthermore, the friction coefficient of films reduces and the wear resistance of films increases.
Keywordaxisymmetric magnetic field arc ion plating macroparticle microstructure friction performance
DOI10.3724/SP.J.1037.2010.00686
Indexed BySCI
Language英语
WOS Research AreaMetallurgy & Metallurgical Engineering
WOS SubjectMetallurgy & Metallurgical Engineering
WOS IDWOS:000291845800009
PublisherSCIENCE CHINA PRESS
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/105634
Collection中国科学院金属研究所
Corresponding AuthorXiao Jinquan
Affiliation1.Chinese Acad Sci, Inst Met Res, Div Surface Engn Mat, Shenyang 110016, Peoples R China
2.Wenzhou Vocat & Tech Coll, Key Lab Mat Proc & Mould Technol, Wenzhou 325035, Peoples R China
Recommended Citation
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Xiao Jinquan,Lang Wenchang,Zhao Yanhui,et al. INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING[J]. ACTA METALLURGICA SINICA,2011,47(5):566-572.
APA Xiao Jinquan,Lang Wenchang,Zhao Yanhui,Gong Jun,Sun Chao,&Wen Lishi.(2011).INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING.ACTA METALLURGICA SINICA,47(5),566-572.
MLA Xiao Jinquan,et al."INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING".ACTA METALLURGICA SINICA 47.5(2011):566-572.
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