INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING

doi:10.3724/SP.J.1037.2010.00686

IMR OpenIR

	INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING
	Xiao Jinquan 1; Lang Wenchang 1,2; Zhao Yanhui 1; Gong Jun 1; Sun Chao 1; Wen Lishi 1
通讯作者	Xiao Jinquan(jqxiao@imr.ac.cn)
	2011-05-11
发表期刊	ACTA METALLURGICA SINICA
ISSN	0412-1961
卷号	47 期号:5 页码:566-572
摘要	Arc ion plating (AIP) has been widely used in the deposition of various kinds of thin solid films. In AIP process, cathode spot motion is the key factor because it affects the physical characteristics of arc plasma, the utilization of cathode materials, the ejection of macroparticles (MPs) and the quality of subsequent films. It has been found that the cathode spot can be steered by an external magnetic field, such as an axisymmetric magnetic field (AMF). In this work, a new AMF produced by using an adjustable electromagnetic coil associated with a concentric magnetic flux guider was applied to the cathode surface to deposit TiN films, and it was focused on the influence of the AMP on the content and size of MPs, microstructure and friction performance of TiN films. The results show that the size and number of MPs decrease significantly with the increase in the transverse component of AMF. Meanwhile, the TiN film (111) preferred orientation enhances and its grain size decreases. Furthermore, the friction coefficient of films reduces and the wear resistance of films increases.
关键词	axisymmetric magnetic field arc ion plating macroparticle microstructure friction performance
DOI	10.3724/SP.J.1037.2010.00686
收录类别	SCI
语种	英语
WOS研究方向	Metallurgy & Metallurgical Engineering
WOS类目	Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000291845800009
出版者	SCIENCE CHINA PRESS
引用统计	被引频次：3[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/105634
专题	中国科学院金属研究所
通讯作者	Xiao Jinquan
作者单位	1.Chinese Acad Sci, Inst Met Res, Div Surface Engn Mat, Shenyang 110016, Peoples R China 2.Wenzhou Vocat & Tech Coll, Key Lab Mat Proc & Mould Technol, Wenzhou 325035, Peoples R China
推荐引用方式 GB/T 7714	Xiao Jinquan,Lang Wenchang,Zhao Yanhui,et al. INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING[J]. ACTA METALLURGICA SINICA,2011,47(5):566-572.
APA	Xiao Jinquan,Lang Wenchang,Zhao Yanhui,Gong Jun,Sun Chao,&Wen Lishi.(2011).INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING.ACTA METALLURGICA SINICA,47(5),566-572.
MLA	Xiao Jinquan,et al."INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING".ACTA METALLURGICA SINICA 47.5(2011):566-572.