| Feasibility of applying microsecond-pulse glow discharge time of flight mass spectrometry in surface depth analysis | |
| Su, YX; Yang, PY; Zhou, Z; Wang, XR; Li, FM; Huang, BL; Ren, JS; Chen, M; Ma, HB; Zhang, GS | |
| Corresponding Author | Yang, PY(pyyang@fudan.edu.cn) |
| 1998-09-04 | |
| Source Publication | SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
 |
| ISSN | 0584-8547 |
| Volume | 53Issue:10Pages:1413-1420 |
| Abstract | This work evaluates the possibilities of applying microsecond-pulse glow discharge time of flight mass spectrometry (mu s-pulse GD-TOFMS) in surface depth analysis. Investigations have been done for effects of discharge pressure on sputtered depth profiles as well as on topographies under mu s-pulse GD mode; and also for influences of discharge current and discharge frequency on characteristics of sputtered surface. Sputtering rates of several pure metals under mu s-pulse GD and dc-GD modes were studied and compared. The estimated erosion rates are 1.27, 2.90 and 5.18 nm s(-1) for pure Fe, Cu and Zn layer, respectively. Depth profiling were conducted for a technical Zr-Fe layer (about 10 mu m) and for a Fe-Cu layer (about 1 mu m) by mu s-pulse GD. A simple model was developed and utilized to convert ion intensity into element concentration, and the experimental results were presented and discussed. Preliminary results show that mu s-pulse GD-TOFMS has a promising future in the area of surface depth analysis, especially in the depth analysis of thin layers and of their cross-sections. (C) 1998 Elsevier Science B.V. All rights reserved. |
| Keyword | microsecond pulse glow discharge time of flight mass spectrometry surface analysis |
| Indexed By | SCI |
| Language | 英语 |
| WOS Research Area | Spectroscopy |
| WOS Subject | Spectroscopy |
| WOS ID | WOS:000076320200008 |
| Publisher | PERGAMON-ELSEVIER SCIENCE LTD |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/107826 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Yang, PY |
| Affiliation | 1.Fudan Univ, Dept Chem, Shanghai 200433, Peoples R China 2.Xiamen Univ, Dept Chem, Analyt Sci Lab, Xiamen 361005, Peoples R China 3.Chinese Acad Sci, Met Res Inst, Shenyang 100015, Peoples R China |
| Recommended Citation GB/T 7714 | Su, YX,Yang, PY,Zhou, Z,et al. Feasibility of applying microsecond-pulse glow discharge time of flight mass spectrometry in surface depth analysis[J]. SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY,1998,53(10):1413-1420. |
| APA | Su, YX.,Yang, PY.,Zhou, Z.,Wang, XR.,Li, FM.,...&Zhang, GS.(1998).Feasibility of applying microsecond-pulse glow discharge time of flight mass spectrometry in surface depth analysis.SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY,53(10),1413-1420. |
| MLA | Su, YX,et al."Feasibility of applying microsecond-pulse glow discharge time of flight mass spectrometry in surface depth analysis".SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY 53.10(1998):1413-1420. |
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