Feasibility of applying microsecond-pulse glow discharge time of flight mass spectrometry in surface depth analysis

IMR OpenIR

	Feasibility of applying microsecond-pulse glow discharge time of flight mass spectrometry in surface depth analysis
	Su, YX ; Yang, PY ; Zhou, Z ; Wang, XR ; Li, FM ; Huang, BL ; Ren, JS ; Chen, M ; Ma, HB ; Zhang, GS
通讯作者	Yang, PY(pyyang@fudan.edu.cn)
	1998-09-04
发表期刊	SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
ISSN	0584-8547
卷号	53 期号:10 页码:1413-1420
摘要	This work evaluates the possibilities of applying microsecond-pulse glow discharge time of flight mass spectrometry (mu s-pulse GD-TOFMS) in surface depth analysis. Investigations have been done for effects of discharge pressure on sputtered depth profiles as well as on topographies under mu s-pulse GD mode; and also for influences of discharge current and discharge frequency on characteristics of sputtered surface. Sputtering rates of several pure metals under mu s-pulse GD and dc-GD modes were studied and compared. The estimated erosion rates are 1.27, 2.90 and 5.18 nm s(-1) for pure Fe, Cu and Zn layer, respectively. Depth profiling were conducted for a technical Zr-Fe layer (about 10 mu m) and for a Fe-Cu layer (about 1 mu m) by mu s-pulse GD. A simple model was developed and utilized to convert ion intensity into element concentration, and the experimental results were presented and discussed. Preliminary results show that mu s-pulse GD-TOFMS has a promising future in the area of surface depth analysis, especially in the depth analysis of thin layers and of their cross-sections. (C) 1998 Elsevier Science B.V. All rights reserved.
关键词	microsecond pulse glow discharge time of flight mass spectrometry surface analysis
收录类别	SCI
语种	英语
WOS研究方向	Spectroscopy
WOS类目	Spectroscopy
WOS记录号	WOS:000076320200008
出版者	PERGAMON-ELSEVIER SCIENCE LTD
引用统计	被引频次：6[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/107826
专题	中国科学院金属研究所
通讯作者	Yang, PY
作者单位	1.Fudan Univ, Dept Chem, Shanghai 200433, Peoples R China 2.Xiamen Univ, Dept Chem, Analyt Sci Lab, Xiamen 361005, Peoples R China 3.Chinese Acad Sci, Met Res Inst, Shenyang 100015, Peoples R China
推荐引用方式 GB/T 7714	Su, YX,Yang, PY,Zhou, Z,et al. Feasibility of applying microsecond-pulse glow discharge time of flight mass spectrometry in surface depth analysis[J]. SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY,1998,53(10):1413-1420.
APA	Su, YX.,Yang, PY.,Zhou, Z.,Wang, XR.,Li, FM.,...&Zhang, GS.(1998).Feasibility of applying microsecond-pulse glow discharge time of flight mass spectrometry in surface depth analysis.SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY,53(10),1413-1420.
MLA	Su, YX,et al."Feasibility of applying microsecond-pulse glow discharge time of flight mass spectrometry in surface depth analysis".SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY 53.10(1998):1413-1420.