| Scanning tunneling microscopy observation to formation procedure of nano-Ti film |
| Xie, TS; Du, H; Meng, XM; Sun, C; Wen, LS
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| 通讯作者 | Xie, TS(tsxie@imr.ac.cn)
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| 2001-02-18
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| 发表期刊 | ACTA METALLURGICA SINICA
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| ISSN | 0412-1961
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| 卷号 | 37期号:2页码:113-117 |
| 摘要 | Nano-Ti films with different thicknesses were deposited on polymer film substrate by magnetron sputtering. Scanning tunneling microscopy (STM) was used to study the structural characteristic. The results show that the film formed at the initial stage is composed of nuclei particles with diameter less than 2 nn and some particle accumulations. With increasing the sputtering time the deposited particles become island-like and then form Ti film consisted of nano particles. The average grain size increases with increasing thickness of film. The influences of substrate and magnetron sputtering conditions on the film structure were discussed. |
| 关键词 | magnetron sputtering
nano-Ti film
scanning tunneling microscopy (STM)
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| 收录类别 | SCI
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| 语种 | 英语
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| WOS研究方向 | Metallurgy & Metallurgical Engineering
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| WOS类目 | Metallurgy & Metallurgical Engineering
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| WOS记录号 | WOS:000172766300001
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| 出版者 | SCIENCE CHINA PRESS
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| 引用统计 |
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| 文献类型 | 期刊论文
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| 条目标识符 | http://ir.imr.ac.cn/handle/321006/113426
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| 专题 | 中国科学院金属研究所
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| 通讯作者 | Xie, TS |
| 作者单位 | Chinese Acad Sci, Inst Met Res, Atom Imaging Solids Lab, Shenyang 110016, Peoples R China
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推荐引用方式
GB/T 7714 |
Xie, TS,Du, H,Meng, XM,et al. Scanning tunneling microscopy observation to formation procedure of nano-Ti film[J]. ACTA METALLURGICA SINICA,2001,37(2):113-117.
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| APA |
Xie, TS,Du, H,Meng, XM,Sun, C,&Wen, LS.(2001).Scanning tunneling microscopy observation to formation procedure of nano-Ti film.ACTA METALLURGICA SINICA,37(2),113-117.
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| MLA |
Xie, TS,et al."Scanning tunneling microscopy observation to formation procedure of nano-Ti film".ACTA METALLURGICA SINICA 37.2(2001):113-117.
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