| Preparation and structure of nano-crystalline WO3(Si) thin films by pulsed excimer laser deposition | |
| Fang, GJ; Liu, ZL; Yao, KL | |
| Corresponding Author | Fang, GJ() |
| 2002 | |
| Source Publication | JOURNAL OF INORGANIC MATERIALS
 |
| ISSN | 1000-324X |
| Volume | 17Issue:1Pages:139-144 |
| Abstract | WO,, thin films were successfully synthesized on Si (111) substrate at different conditions by using scanning excimer laser ablation technique. The structure of WOx thin films deposited at different conditions was analyzed by STEM, XRD, RS. The thin films deposited at 300 and 400degreesC under 20Pa oxygen pressure showed nano-crystalline triclinic structure. The experimental results illustrate that the oxygen pressure and the deposition temperature are two important parameters for determining the structure and chemical composition of the synthesized thin films. |
| Keyword | WO3 thin films nano-crystalline PLD technique structural analyses preparation conditions Si (111) |
| Indexed By | SCI |
| Language | 英语 |
| WOS Research Area | Materials Science |
| WOS Subject | Materials Science, Ceramics |
| WOS ID | WOS:000174436700023 |
| Publisher | SCIENCE CHINA PRESS |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/114893 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Fang, GJ |
| Affiliation | 1.Huazhong Univ Sci & Technol, Natl Lab Laser Technol, Wuhan 430074, Peoples R China 2.Huazhong Univ Sci & Technol, Dept Phys, Wuhan 430074, Peoples R China 3.Xiangfan Univ, Dept Phys, Xiangtan 441053, Peoples R China 4.Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110015, Peoples R China |
| Recommended Citation GB/T 7714 | Fang, GJ,Liu, ZL,Yao, KL. Preparation and structure of nano-crystalline WO3(Si) thin films by pulsed excimer laser deposition[J]. JOURNAL OF INORGANIC MATERIALS,2002,17(1):139-144. |
| APA | Fang, GJ,Liu, ZL,&Yao, KL.(2002).Preparation and structure of nano-crystalline WO3(Si) thin films by pulsed excimer laser deposition.JOURNAL OF INORGANIC MATERIALS,17(1),139-144. |
| MLA | Fang, GJ,et al."Preparation and structure of nano-crystalline WO3(Si) thin films by pulsed excimer laser deposition".JOURNAL OF INORGANIC MATERIALS 17.1(2002):139-144. |
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