Yield strength determination of TiN film by in-situ XRD stress analysis method

IMR OpenIR

	Yield strength determination of TiN film by in-situ XRD stress analysis method
	Qin, M ; Ji, V ; Xu, JH ; Li, JB ; Xu, KW ; Ma, SL
	2002
发表期刊	ECRS 6: PROCEEDINGS OF THE 6TH EUROPEAN CONFERENCE ON RESIDUAL STRESSES
ISSN	0255-5476
卷号	404-7 页码:671-676
摘要	By X-ray stress analysis technique, a new approach has been applied to determining the yield strength of polycrystalline TiN film with biaxial residual stress adherent to metal substrate. By plasma-assisted chemical vapor deposition (PACVD), TiN film was deposited on a strip of spring steel 60Mn allowing the film to be subjected to tensile stress under loading of the film/substrate. The film thickness is 2.5mum and the steel substrate thickness is 1.1mm. Longitudinal and transverse stresses, sigma(1), and sigma(2) of the film were measured in situ by X-ray diffraction. On the basis of the experimental results, the effective stress (sigma) over bar and the effective uniaxial strain (epsilon) over bar (t), were obtained. According to the (sigma) over bar - (epsilon) over bar (t), relation, the calculated proof stresses, sigma(0.1), and sigma(0.2), of TiN film are 4.2GPa and 4.4GPa, respectively.
关键词	yield strength TiN film biaxial stress X-ray diffraction
收录类别	SCI
语种	英语
WOS研究方向	Materials Science
WOS类目	Materials Science, Multidisciplinary
WOS记录号	WOS:000177256900104
出版者	TRANS TECH PUBLICATIONS LTD
引用统计	被引频次：4[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/115129
专题	中国科学院金属研究所
作者单位	1.Chinese Acad Sci, Inst Met Res, SYNL Mat Sci, Shenyang 110016, Peoples R China 2.ENSAM, LM3 ESA CNRS 8006, F-75013 Paris, France 3.Xian Jiaotong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China
推荐引用方式 GB/T 7714	Qin, M,Ji, V,Xu, JH,et al. Yield strength determination of TiN film by in-situ XRD stress analysis method[J]. ECRS 6: PROCEEDINGS OF THE 6TH EUROPEAN CONFERENCE ON RESIDUAL STRESSES,2002,404-7:671-676.
APA	Qin, M,Ji, V,Xu, JH,Li, JB,Xu, KW,&Ma, SL.(2002).Yield strength determination of TiN film by in-situ XRD stress analysis method.ECRS 6: PROCEEDINGS OF THE 6TH EUROPEAN CONFERENCE ON RESIDUAL STRESSES,404-7,671-676.
MLA	Qin, M,et al."Yield strength determination of TiN film by in-situ XRD stress analysis method".ECRS 6: PROCEEDINGS OF THE 6TH EUROPEAN CONFERENCE ON RESIDUAL STRESSES 404-7(2002):671-676.