Microstructural study on multilayer [FeTaN/TaN](5) films | |
Zhan, Q; Yu, R; He, LL; Li, DX; Nie, HB; Ong, C | |
Corresponding Author | Zhan, Q() |
2003-08-01 | |
Source Publication | MATERIALS LETTERS
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ISSN | 0167-577X |
Volume | 57Issue:24-25Pages:3904-3909 |
Abstract | The microstructure of [FeTaN/TaN](5) multilayer films has been investigated by transmission electron microscopy (TEM) and high-resolution electron microscopy (HREM) in cross section and plan view. Each layer shows a small surface roughening less than 1 nm. The FeTaN layers are composed of b.c.c. Fe with Ta incorporated substitutionally and N interstitially, denoted as Fe(Ta,N); while the TaN layers mainly consist of f.c.c. TaN phase. A [110] texture of Fe(Ta,N) has been formed in the FeTaN layers. The columnar grain structure is a typical feature in FeTaN layers. (C) 2003 Elsevier Science B.V. All rights reserved. |
Keyword | microstructure thin films magnetic materials transmission electron microscopy (TEM) sputtering |
DOI | 10.1016/S0167-577X(03)00238-6 |
Indexed By | SCI |
Language | 英语 |
WOS Research Area | Materials Science ; Physics |
WOS Subject | Materials Science, Multidisciplinary ; Physics, Applied |
WOS ID | WOS:000184846900035 |
Publisher | ELSEVIER SCIENCE BV |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.imr.ac.cn/handle/321006/116597 |
Collection | 中国科学院金属研究所 |
Corresponding Author | Zhan, Q |
Affiliation | 1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China 2.Natl Univ Singapore, Dept Phys, Singapore 119260, Singapore 3.Natl Univ Singapore, Ctr Superconducting & Magnet Mat, Singapore 119260, Singapore |
Recommended Citation GB/T 7714 | Zhan, Q,Yu, R,He, LL,et al. Microstructural study on multilayer [FeTaN/TaN](5) films[J]. MATERIALS LETTERS,2003,57(24-25):3904-3909. |
APA | Zhan, Q,Yu, R,He, LL,Li, DX,Nie, HB,&Ong, C.(2003).Microstructural study on multilayer [FeTaN/TaN](5) films.MATERIALS LETTERS,57(24-25),3904-3909. |
MLA | Zhan, Q,et al."Microstructural study on multilayer [FeTaN/TaN](5) films".MATERIALS LETTERS 57.24-25(2003):3904-3909. |
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