Microstructural study on multilayer [FeTaN/TaN](5) films

doi:10.1016/S0167-577X(03)00238-6

IMR OpenIR

	Microstructural study on multilayer [FeTaN/TaN](5) films
	Zhan, Q ; Yu, R ; He, LL ; Li, DX ; Nie, HB ; Ong, C
通讯作者	Zhan, Q()
	2003-08-01
发表期刊	MATERIALS LETTERS
ISSN	0167-577X
卷号	57 期号:24-25 页码:3904-3909
摘要	The microstructure of [FeTaN/TaN](5) multilayer films has been investigated by transmission electron microscopy (TEM) and high-resolution electron microscopy (HREM) in cross section and plan view. Each layer shows a small surface roughening less than 1 nm. The FeTaN layers are composed of b.c.c. Fe with Ta incorporated substitutionally and N interstitially, denoted as Fe(Ta,N); while the TaN layers mainly consist of f.c.c. TaN phase. A [110] texture of Fe(Ta,N) has been formed in the FeTaN layers. The columnar grain structure is a typical feature in FeTaN layers. (C) 2003 Elsevier Science B.V. All rights reserved.
关键词	microstructure thin films magnetic materials transmission electron microscopy (TEM) sputtering
DOI	10.1016/S0167-577X(03)00238-6
收录类别	SCI
语种	英语
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Physics, Applied
WOS记录号	WOS:000184846900035
出版者	ELSEVIER SCIENCE BV
引用统计	被引频次：6[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/116597
专题	中国科学院金属研究所
通讯作者	Zhan, Q
作者单位	1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China 2.Natl Univ Singapore, Dept Phys, Singapore 119260, Singapore 3.Natl Univ Singapore, Ctr Superconducting & Magnet Mat, Singapore 119260, Singapore
推荐引用方式 GB/T 7714	Zhan, Q,Yu, R,He, LL,et al. Microstructural study on multilayer [FeTaN/TaN](5) films[J]. MATERIALS LETTERS,2003,57(24-25):3904-3909.
APA	Zhan, Q,Yu, R,He, LL,Li, DX,Nie, HB,&Ong, C.(2003).Microstructural study on multilayer [FeTaN/TaN](5) films.MATERIALS LETTERS,57(24-25),3904-3909.
MLA	Zhan, Q,et al."Microstructural study on multilayer [FeTaN/TaN](5) films".MATERIALS LETTERS 57.24-25(2003):3904-3909.