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Microstructure and hardness of chromium oxide coatings by arc ion plating
Ji, AL; Wang, W; Song, GH; Wang, AY; Sin, C; Wen, LS
通讯作者Ji, AL()
2003-09-01
发表期刊ACTA METALLURGICA SINICA
ISSN0412-1961
卷号39期号:9页码:979-983
摘要Chromium oxide thin film was deposited on stainless steel by arc ion plating (ATP). The effects of the flow rate of oxygen and pulse bias voltage on the structure, deposition rate and the surface morphology of thin film were studied. The microhardness of thin film was measured at different pulse bias voltage. The results show that the Cr2O3 film has {001} plane texture at the oxygen flow rate of 130 cm(3)/s and a bias voltage of -100 V. The higher the oxygen flow rate and bias voltage, the less the big particles in the thin film. Stoichiometric Cr2O3 thin film obtained at oxygen flow rate of 130 cm(3)/s and a bias voltage of -200 V has an optimal hardness value up to 36 GPa.
关键词Cr2O3 thin film arc ion plating microstructure pulse bias voltage
收录类别SCI
语种英语
WOS研究方向Metallurgy & Metallurgical Engineering
WOS类目Metallurgy & Metallurgical Engineering
WOS记录号WOS:000186144000016
出版者SCIENCE CHINA PRESS
引用统计
被引频次:8[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/117548
专题中国科学院金属研究所
通讯作者Ji, AL
作者单位Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
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GB/T 7714
Ji, AL,Wang, W,Song, GH,et al. Microstructure and hardness of chromium oxide coatings by arc ion plating[J]. ACTA METALLURGICA SINICA,2003,39(9):979-983.
APA Ji, AL,Wang, W,Song, GH,Wang, AY,Sin, C,&Wen, LS.(2003).Microstructure and hardness of chromium oxide coatings by arc ion plating.ACTA METALLURGICA SINICA,39(9),979-983.
MLA Ji, AL,et al."Microstructure and hardness of chromium oxide coatings by arc ion plating".ACTA METALLURGICA SINICA 39.9(2003):979-983.
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