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Stress-strain relationship of a TiN film adherent to substrate
Qin, M; Ji, N; Wang, W; Chen, CR; Li, JB; Ma, SL
Corresponding AuthorQin, M()
2003-07-11
Source PublicationACTA METALLURGICA SINICA
ISSN0412-1961
Volume39Issue:7Pages:721-724
AbstractBy plasma-assisted chemical vapor deposition (PACVD), TiN film with 2.5 mum thickness was deposited on a strip of spring steel 60Mn, which can be subjected to tensile stress under loading of the film/substrate. Longitudinal and transverse stresses, sigma1, and sigma2, and applied strain, Sa, for TiN film were measured by X-ray tensile test. On the basis of the experimental results, the effective stress (σ) over bar and the effective uniaxial strain (ε(t)) over bar were obtained. According to the (σ) over bar- (ε(t)) over bar relation, the calculated proof stresses, sigma(0.1) and sigma(0.2), of TiN film are 4.2 GPa and 4.4 GPa, respectively. The hardness and Young's modulus determined by nanoindenter are 25 GPa and 420 GPa, respectively. The plastic flow in TiN film occurs under tensile.
KeywordTiN film biaxial stress stress-strain relation X-ray tensile test nanoindentation
Indexed BySCI
Language英语
WOS Research AreaMetallurgy & Metallurgical Engineering
WOS SubjectMetallurgy & Metallurgical Engineering
WOS IDWOS:000184627200009
PublisherSCIENCE CHINA PRESS
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/117665
Collection中国科学院金属研究所
Corresponding AuthorQin, M
Affiliation1.Chinese Acad Sci, Met Res Inst, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
2.Ecole Natl Super Arts & Metiers, CNRS, LM3, ESA 8006, F-75013 Paris, France
3.Xian Jiaotong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China
Recommended Citation
GB/T 7714
Qin, M,Ji, N,Wang, W,et al. Stress-strain relationship of a TiN film adherent to substrate[J]. ACTA METALLURGICA SINICA,2003,39(7):721-724.
APA Qin, M,Ji, N,Wang, W,Chen, CR,Li, JB,&Ma, SL.(2003).Stress-strain relationship of a TiN film adherent to substrate.ACTA METALLURGICA SINICA,39(7),721-724.
MLA Qin, M,et al."Stress-strain relationship of a TiN film adherent to substrate".ACTA METALLURGICA SINICA 39.7(2003):721-724.
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