Stress-strain relationship of a TiN film adherent to substrate
Qin, M; Ji, N; Wang, W; Chen, CR; Li, JB; Ma, SL
Corresponding AuthorQin, M()
AbstractBy plasma-assisted chemical vapor deposition (PACVD), TiN film with 2.5 mum thickness was deposited on a strip of spring steel 60Mn, which can be subjected to tensile stress under loading of the film/substrate. Longitudinal and transverse stresses, sigma1, and sigma2, and applied strain, Sa, for TiN film were measured by X-ray tensile test. On the basis of the experimental results, the effective stress (σ) over bar and the effective uniaxial strain (ε(t)) over bar were obtained. According to the (σ) over bar- (ε(t)) over bar relation, the calculated proof stresses, sigma(0.1) and sigma(0.2), of TiN film are 4.2 GPa and 4.4 GPa, respectively. The hardness and Young's modulus determined by nanoindenter are 25 GPa and 420 GPa, respectively. The plastic flow in TiN film occurs under tensile.
KeywordTiN film biaxial stress stress-strain relation X-ray tensile test nanoindentation
Indexed BySCI
WOS Research AreaMetallurgy & Metallurgical Engineering
WOS SubjectMetallurgy & Metallurgical Engineering
WOS IDWOS:000184627200009
Citation statistics
Document Type期刊论文
Corresponding AuthorQin, M
Affiliation1.Chinese Acad Sci, Met Res Inst, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
2.Ecole Natl Super Arts & Metiers, CNRS, LM3, ESA 8006, F-75013 Paris, France
3.Xian Jiaotong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China
Recommended Citation
GB/T 7714
Qin, M,Ji, N,Wang, W,et al. Stress-strain relationship of a TiN film adherent to substrate[J]. ACTA METALLURGICA SINICA,2003,39(7):721-724.
APA Qin, M,Ji, N,Wang, W,Chen, CR,Li, JB,&Ma, SL.(2003).Stress-strain relationship of a TiN film adherent to substrate.ACTA METALLURGICA SINICA,39(7),721-724.
MLA Qin, M,et al."Stress-strain relationship of a TiN film adherent to substrate".ACTA METALLURGICA SINICA 39.7(2003):721-724.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Qin, M]'s Articles
[Ji, N]'s Articles
[Wang, W]'s Articles
Baidu academic
Similar articles in Baidu academic
[Qin, M]'s Articles
[Ji, N]'s Articles
[Wang, W]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Qin, M]'s Articles
[Ji, N]'s Articles
[Wang, W]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.