Analysis and calculation of forces on macroparticles in plasma sheath

IMR OpenIR

	Analysis and calculation of forces on macroparticles in plasma sheath
	Guo, HM ; Lin, GQ ; Sheng, MY ; Wang, DZ ; Dong, C ; Wen, LS
通讯作者	Lin, GQ()
	2004-10-11
发表期刊	ACTA METALLURGICA SINICA
ISSN	0412-1961
卷号	40 期号:10 页码:1064-1068
摘要	Applying the plasma sheath models given by Edlberg and Aydil, the charging effect and forces acting on macroparticles are analyzed and calculated in pulsed-bias arc ion plating, which gives an evidence to the experimental phenomenon and physical model in which macroparticles would be repulsed from electric force and hence are significantly reduced.
关键词	macroparticle arc ion plating pulsed bias plasma sheath force analysis
收录类别	SCI
语种	英语
WOS研究方向	Metallurgy & Metallurgical Engineering
WOS类目	Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000224871300011
出版者	SCIENCE CHINA PRESS
引用统计	被引频次：3[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/119815
专题	中国科学院金属研究所
通讯作者	Lin, GQ
作者单位	1.Dalian Univ Technol, State Key Lab Mat Modificat Laser Ion & Electron, Dalian 116024, Peoples R China 2.Dalian Univ Technol, Dept Phys, Dalian 116024, Peoples R China 3.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Guo, HM,Lin, GQ,Sheng, MY,et al. Analysis and calculation of forces on macroparticles in plasma sheath[J]. ACTA METALLURGICA SINICA,2004,40(10):1064-1068.
APA	Guo, HM,Lin, GQ,Sheng, MY,Wang, DZ,Dong, C,&Wen, LS.(2004).Analysis and calculation of forces on macroparticles in plasma sheath.ACTA METALLURGICA SINICA,40(10),1064-1068.
MLA	Guo, HM,et al."Analysis and calculation of forces on macroparticles in plasma sheath".ACTA METALLURGICA SINICA 40.10(2004):1064-1068.