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STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES
Han Kechang1; Liu Yiqi1; Lin Guoqiang1; Dong Chuang1; Tai Kaiping2; Jiang Xin2
Corresponding AuthorLin Guoqiang(gqlin@dlut.edu.cn)
2016-12-12
Source PublicationACTA METALLURGICA SINICA
ISSN0412-1961
Volume52Issue:12Pages:1601-1609
AbstractTransition-metal nitrides have long attracted considerable attention among researchers and ubiquitous applications in various fields due to their renowned mechanical properties. However almost all the discussions of the strengthening mechanism were on conventional meso scale. For further understanding on the atomic scale strengthening mechanism of transition-metal nitrides, three groups of MNx(M=Ti, Zr, Hf) films with different nitrogen contents were synthesized on the Si substrates by magnetic filtering arc ion plating. The morphologies and thickness of the as-deposited films were characterized by FESEM, the microstructures and the residual stresses were characterized by XRD, the XPS and Nano Indenter were used to measure the chemical states and hardness (also the elastic modulus) of as-deposited films, respectively. The results show that all three groups MNx films perform the B1-NaCl single-phase structure within the large composition ranges. The preferred orientation, thickness, grain size and residual stress of the MNx films with different nitrogen contents were not changed so much. While the nanohardness and elastic modulus of MNx both first increased and then decreased with the rise of nitrogen content, and the peak values all existed when x near to 0.82. The strengthening mechanism was discussed and the decisive factor of composition dependent hardness enhancement was found from the atomic-scale chemical bonding states and electronic structure in this work, rather than the conventional meso-scale factors, such as preferred orientation, grain size and residual stress.
Keywordtransition-metal nitride film arc ion plating composition mechanical property strengthening mechanism
Funding OrganizationNational Natural Science Foundation of China
DOI10.11900/0412.1961.2016.00078
Indexed BySCI
Language英语
Funding ProjectNational Natural Science Foundation of China[51271047]
WOS Research AreaMetallurgy & Metallurgical Engineering
WOS SubjectMetallurgy & Metallurgical Engineering
WOS IDWOS:000391244600015
PublisherSCIENCE PRESS
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/123554
Collection中国科学院金属研究所
Corresponding AuthorLin Guoqiang
Affiliation1.Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Elect Beams, Dalian 116024, Peoples R China
2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
Recommended Citation
GB/T 7714
Han Kechang,Liu Yiqi,Lin Guoqiang,et al. STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES[J]. ACTA METALLURGICA SINICA,2016,52(12):1601-1609.
APA Han Kechang,Liu Yiqi,Lin Guoqiang,Dong Chuang,Tai Kaiping,&Jiang Xin.(2016).STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES.ACTA METALLURGICA SINICA,52(12),1601-1609.
MLA Han Kechang,et al."STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES".ACTA METALLURGICA SINICA 52.12(2016):1601-1609.
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