STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES

doi:10.11900/0412.1961.2016.00078

IMR OpenIR

	STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES
	Han Kechang 1; Liu Yiqi 1; Lin Guoqiang 1; Dong Chuang 1; Tai Kaiping 2; Jiang Xin 2
通讯作者	Lin Guoqiang(gqlin@dlut.edu.cn)
	2016-12-12
发表期刊	ACTA METALLURGICA SINICA
ISSN	0412-1961
卷号	52 期号:12 页码:1601-1609
摘要	Transition-metal nitrides have long attracted considerable attention among researchers and ubiquitous applications in various fields due to their renowned mechanical properties. However almost all the discussions of the strengthening mechanism were on conventional meso scale. For further understanding on the atomic scale strengthening mechanism of transition-metal nitrides, three groups of MNx(M=Ti, Zr, Hf) films with different nitrogen contents were synthesized on the Si substrates by magnetic filtering arc ion plating. The morphologies and thickness of the as-deposited films were characterized by FESEM, the microstructures and the residual stresses were characterized by XRD, the XPS and Nano Indenter were used to measure the chemical states and hardness (also the elastic modulus) of as-deposited films, respectively. The results show that all three groups MNx films perform the B1-NaCl single-phase structure within the large composition ranges. The preferred orientation, thickness, grain size and residual stress of the MNx films with different nitrogen contents were not changed so much. While the nanohardness and elastic modulus of MNx both first increased and then decreased with the rise of nitrogen content, and the peak values all existed when x near to 0.82. The strengthening mechanism was discussed and the decisive factor of composition dependent hardness enhancement was found from the atomic-scale chemical bonding states and electronic structure in this work, rather than the conventional meso-scale factors, such as preferred orientation, grain size and residual stress.
关键词	transition-metal nitride film arc ion plating composition mechanical property strengthening mechanism
资助者	National Natural Science Foundation of China
DOI	10.11900/0412.1961.2016.00078
收录类别	SCI
语种	英语
资助项目	National Natural Science Foundation of China[51271047]
WOS研究方向	Metallurgy & Metallurgical Engineering
WOS类目	Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000391244600015
出版者	SCIENCE PRESS
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/123554
专题	中国科学院金属研究所
通讯作者	Lin Guoqiang
作者单位	1.Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Elect Beams, Dalian 116024, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Han Kechang,Liu Yiqi,Lin Guoqiang,et al. STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES[J]. ACTA METALLURGICA SINICA,2016,52(12):1601-1609.
APA	Han Kechang,Liu Yiqi,Lin Guoqiang,Dong Chuang,Tai Kaiping,&Jiang Xin.(2016).STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES.ACTA METALLURGICA SINICA,52(12),1601-1609.
MLA	Han Kechang,et al."STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES".ACTA METALLURGICA SINICA 52.12(2016):1601-1609.