Polymer MEMS actuators for underwater micromanipulation
Zhou, JWL; Chan, HY; To, TKH; Lai, KWC; Li, WJ
Corresponding AuthorZhou, JWL()
AbstractConventional MEMS actuators are not suitable for underwater applications such as cell grasping due to two main reasons: 1) their required actuation voltage are typically higher than 2 V, which would cause electrolysis in water and 2) they have small displacement/deflection due to their inherent driving principles. In this paper, three-different types of novel polymer-based MEMS underwater actuators developed in our laboratory are discussed: 1) ionic conducting polymer films (ICPF) actuator, which actuates by stress gradient induced by ionic movement due to electric field; 2) parylene thermal actuator, which actuates due to the induced stress gradient across a structure made of different layers of materials with different thermal expansion coefficients; and 3) polyaniline (PANI) actuator, which actuates due to its volumetric change caused by a reversible electrochemical oxidation-reduction (redox) reaction. All these polymer micro actuators can be actuated underwater with large deflections and require less power input than conventional MEMS actuators. The experimental results from characterizing these prototype actuators are presented in this paper.
Keywordcellular grippers micro manipulation micro polymer actuators polymer MEMS actuators
Indexed BySCI
WOS Research AreaAutomation & Control Systems ; Engineering
WOS SubjectAutomation & Control Systems ; Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Engineering, Mechanical
WOS IDWOS:000222256500004
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Cited Times:99[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Corresponding AuthorZhou, JWL
Affiliation1.Chinese Univ Hong Kong, Ctr Micro & Nano Syst, Shatin, Hong Kong, Peoples R China
2.Chinese Acad Sci, Micro & Nano Automat Lab, Shenyang, Liaoning, Peoples R China
Recommended Citation
GB/T 7714
Zhou, JWL,Chan, HY,To, TKH,et al. Polymer MEMS actuators for underwater micromanipulation[J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS,2004,9(2):334-342.
APA Zhou, JWL,Chan, HY,To, TKH,Lai, KWC,&Li, WJ.(2004).Polymer MEMS actuators for underwater micromanipulation.IEEE-ASME TRANSACTIONS ON MECHATRONICS,9(2),334-342.
MLA Zhou, JWL,et al."Polymer MEMS actuators for underwater micromanipulation".IEEE-ASME TRANSACTIONS ON MECHATRONICS 9.2(2004):334-342.
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