| Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters | |
| Arjmandi-Tash, Hadi1,2; Allain, Adrien1,3; Han, Zheng (Vitto)1,4; Bouchiat, Vincent1 | |
| Corresponding Author | Arjmandi-Tash, Hadi(h.arjmandi.tash@lic.leidenuniv.nl) |
| 2017-06-01 | |
| Source Publication | 2D MATERIALS
 |
| ISSN | 2053-1583 |
| Volume | 4Issue:2Pages:7 |
| Abstract | We present a novel method for the fabrication of the arrays of suspended micron-sized membranes, based on monolayer pulsed-CVD graphene. Such devices are the source of an efficient integration of graphene nano-electro-mechanical resonators, compatible with production at the wafer scale using standard photolithography and processing tools. As the graphene surface is continuously protected by the same polymer layer during the whole process, suspended graphene membranes are clean and free of imperfections such as deposits, wrinkles and tears. Batch fabrication of 100 mu m-long multi-connected suspended ribbons is presented. At room temperature, mechanical resonance of electrostatically-actuated devices show narrow distribution of their characteristic parameters with high quality factor and low effective mass and resonance frequencies, as expected for low stress and adsorbate-free membranes. Upon cooling, a sharp increase of both resonant frequency and quality factor is observed, enabling to extract the thermal expansion coefficient of CVD graphene. Comparison with state-of-the-art graphene NEMS is presented. |
| Keyword | graphene resonators quality factor coefficient of thermal expansion mass and force sensors |
| Funding Organization | Nanoscience Foundation of Grenoble ; French ANR contract SUPERGRAPH ; French ANR contract CLEANGRAPH ; French ANR contract DIRACFORMAG ; EU ; ERC ; EU FP7 Graphene Flagship ; Region Rhone-Alpes CIBLE program |
| DOI | 10.1088/2053-1583/aa57c6 |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | Nanoscience Foundation of Grenoble ; French ANR contract SUPERGRAPH ; French ANR contract CLEANGRAPH ; French ANR contract DIRACFORMAG ; EU[NMP3-SL-2010-246073] ; ERC ; EU FP7 Graphene Flagship[604391] ; Region Rhone-Alpes CIBLE program |
| WOS Research Area | Materials Science |
| WOS Subject | Materials Science, Multidisciplinary |
| WOS ID | WOS:000423452400001 |
| Publisher | IOP PUBLISHING LTD |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/127262 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Arjmandi-Tash, Hadi |
| Affiliation | 1.Univ Grenoble Alpes, CNRS, Inst Neel, F-38000 Grenoble, France 2.Leiden Univ, Leiden Inst Chem, Fac Sci, Leiden, Netherlands 3.Ecole Polytech Fed Lausanne, Lab Nanoscale Elect & Struct, Stn 17, CH-1015 Lausanne, Switzerland 4.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China |
| Recommended Citation GB/T 7714 | Arjmandi-Tash, Hadi,Allain, Adrien,Han, Zheng ,et al. Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters[J]. 2D MATERIALS,2017,4(2):7. |
| APA | Arjmandi-Tash, Hadi,Allain, Adrien,Han, Zheng ,&Bouchiat, Vincent.(2017).Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters.2D MATERIALS,4(2),7. |
| MLA | Arjmandi-Tash, Hadi,et al."Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters".2D MATERIALS 4.2(2017):7. |
| Files in This Item: | There are no files associated with this item. | |||||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment