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Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters
Arjmandi-Tash, Hadi1,2; Allain, Adrien1,3; Han, Zheng (Vitto)1,4; Bouchiat, Vincent1
Corresponding AuthorArjmandi-Tash, Hadi(h.arjmandi.tash@lic.leidenuniv.nl)
2017-06-01
Source Publication2D MATERIALS
ISSN2053-1583
Volume4Issue:2Pages:7
AbstractWe present a novel method for the fabrication of the arrays of suspended micron-sized membranes, based on monolayer pulsed-CVD graphene. Such devices are the source of an efficient integration of graphene nano-electro-mechanical resonators, compatible with production at the wafer scale using standard photolithography and processing tools. As the graphene surface is continuously protected by the same polymer layer during the whole process, suspended graphene membranes are clean and free of imperfections such as deposits, wrinkles and tears. Batch fabrication of 100 mu m-long multi-connected suspended ribbons is presented. At room temperature, mechanical resonance of electrostatically-actuated devices show narrow distribution of their characteristic parameters with high quality factor and low effective mass and resonance frequencies, as expected for low stress and adsorbate-free membranes. Upon cooling, a sharp increase of both resonant frequency and quality factor is observed, enabling to extract the thermal expansion coefficient of CVD graphene. Comparison with state-of-the-art graphene NEMS is presented.
Keywordgraphene resonators quality factor coefficient of thermal expansion mass and force sensors
Funding OrganizationNanoscience Foundation of Grenoble ; French ANR contract SUPERGRAPH ; French ANR contract CLEANGRAPH ; French ANR contract DIRACFORMAG ; EU ; ERC ; EU FP7 Graphene Flagship ; Region Rhone-Alpes CIBLE program
DOI10.1088/2053-1583/aa57c6
Indexed BySCI
Language英语
Funding ProjectNanoscience Foundation of Grenoble ; French ANR contract SUPERGRAPH ; French ANR contract CLEANGRAPH ; French ANR contract DIRACFORMAG ; EU[NMP3-SL-2010-246073] ; ERC ; EU FP7 Graphene Flagship[604391] ; Region Rhone-Alpes CIBLE program
WOS Research AreaMaterials Science
WOS SubjectMaterials Science, Multidisciplinary
WOS IDWOS:000423452400001
PublisherIOP PUBLISHING LTD
Citation statistics
Cited Times:9[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/127262
Collection中国科学院金属研究所
Corresponding AuthorArjmandi-Tash, Hadi
Affiliation1.Univ Grenoble Alpes, CNRS, Inst Neel, F-38000 Grenoble, France
2.Leiden Univ, Leiden Inst Chem, Fac Sci, Leiden, Netherlands
3.Ecole Polytech Fed Lausanne, Lab Nanoscale Elect & Struct, Stn 17, CH-1015 Lausanne, Switzerland
4.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China
Recommended Citation
GB/T 7714
Arjmandi-Tash, Hadi,Allain, Adrien,Han, Zheng ,et al. Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters[J]. 2D MATERIALS,2017,4(2):7.
APA Arjmandi-Tash, Hadi,Allain, Adrien,Han, Zheng ,&Bouchiat, Vincent.(2017).Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters.2D MATERIALS,4(2),7.
MLA Arjmandi-Tash, Hadi,et al."Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters".2D MATERIALS 4.2(2017):7.
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