Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters

doi:10.1088/2053-1583/aa57c6

IMR OpenIR

	Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters
	Arjmandi-Tash, Hadi 1,2; Allain, Adrien 1,3; Han, Zheng (Vitto)1,4; Bouchiat, Vincent 1
通讯作者	Arjmandi-Tash, Hadi(h.arjmandi.tash@lic.leidenuniv.nl)
	2017-06-01
发表期刊	2D MATERIALS
ISSN	2053-1583
卷号	4 期号:2 页码:7
摘要	We present a novel method for the fabrication of the arrays of suspended micron-sized membranes, based on monolayer pulsed-CVD graphene. Such devices are the source of an efficient integration of graphene nano-electro-mechanical resonators, compatible with production at the wafer scale using standard photolithography and processing tools. As the graphene surface is continuously protected by the same polymer layer during the whole process, suspended graphene membranes are clean and free of imperfections such as deposits, wrinkles and tears. Batch fabrication of 100 mu m-long multi-connected suspended ribbons is presented. At room temperature, mechanical resonance of electrostatically-actuated devices show narrow distribution of their characteristic parameters with high quality factor and low effective mass and resonance frequencies, as expected for low stress and adsorbate-free membranes. Upon cooling, a sharp increase of both resonant frequency and quality factor is observed, enabling to extract the thermal expansion coefficient of CVD graphene. Comparison with state-of-the-art graphene NEMS is presented.
关键词	graphene resonators quality factor coefficient of thermal expansion mass and force sensors
资助者	Nanoscience Foundation of Grenoble ; French ANR contract SUPERGRAPH ; French ANR contract CLEANGRAPH ; French ANR contract DIRACFORMAG ; EU ; ERC ; EU FP7 Graphene Flagship ; Region Rhone-Alpes CIBLE program
DOI	10.1088/2053-1583/aa57c6
收录类别	SCI
语种	英语
资助项目	Nanoscience Foundation of Grenoble ; French ANR contract SUPERGRAPH ; French ANR contract CLEANGRAPH ; French ANR contract DIRACFORMAG ; EU[NMP3-SL-2010-246073] ; ERC ; EU FP7 Graphene Flagship[604391] ; Region Rhone-Alpes CIBLE program
WOS研究方向	Materials Science
WOS类目	Materials Science, Multidisciplinary
WOS记录号	WOS:000423452400001
出版者	IOP PUBLISHING LTD
引用统计	被引频次：17[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/127262
专题	中国科学院金属研究所
通讯作者	Arjmandi-Tash, Hadi
作者单位	1.Univ Grenoble Alpes, CNRS, Inst Neel, F-38000 Grenoble, France 2.Leiden Univ, Leiden Inst Chem, Fac Sci, Leiden, Netherlands 3.Ecole Polytech Fed Lausanne, Lab Nanoscale Elect & Struct, Stn 17, CH-1015 Lausanne, Switzerland 4.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China
推荐引用方式 GB/T 7714	Arjmandi-Tash, Hadi,Allain, Adrien,Han, Zheng ,et al. Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters[J]. 2D MATERIALS,2017,4(2):7.
APA	Arjmandi-Tash, Hadi,Allain, Adrien,Han, Zheng ,&Bouchiat, Vincent.(2017).Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters.2D MATERIALS,4(2),7.
MLA	Arjmandi-Tash, Hadi,et al."Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters".2D MATERIALS 4.2(2017):7.