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Growth behavior of CVD diamond films with enhanced electron field emission properties over a wide range of experimental parameters
Jia, Xinyi1,2; Huang, Nan1; Guo, Yuning3; Liu, Lusheng1; Li, Peng1; Zhai, Zhaofeng1,2; Yang, Bing1; Yuan, Ziyao1,2; Shi, Dan1,2; Jiang, Xin1,3
Corresponding AuthorJiang, Xin(xjiang@imr.ac.cn)
2018-12-01
Source PublicationJOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
ISSN1005-0302
Volume34Issue:12Pages:2398-2406
AbstractIn this study, diamond films were synthesized on silicon substrates by microwave plasma enhanced chemical vapor deposition (CVD) over a wide range of experimental parameters. The effects of the microwave power, CH4/H-2 ratio and gas pressure on the morphology, growth rate, composition, and quality of diamond films were investigated by means of scanning electron microscope (SEM), X-ray diffraction (XRD), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). A rise of microwave power can lead to an increasing pyrolysis of hydrogen and methane, so that the microcrystalline diamond film could be synthesized at low CH4/H-2 levels. Gas pressure has similar effect in changing the morphology of diamond films, and high gas pressure also results in dramatically increased grain size. However, diamond film is deteriorated at high CH4/H-2 ratio due to the abundant graphite content including in the films. Under an extreme condition of high microwave power of 10 kW and high CH4 concentration, a hybrid film composed of diamond/graphite was successfully formed in the absence of N-2 or Ar, which is different from other reports. This composite structure has an excellent measured sheet resistance of 10-100 Omega/Sqr. which allows it to be utilized as field electron emitter. The diamond/graphite hybrid nanostructure displays excellent electron field emission (EFE) properties with a low turn-on field of 2.17 V/mu m and beta = 3160, therefore it could be a promising alternative in field emission applications. (C) 2018 Published by Elsevier Ltd on behalf of The editorial office of Journal of Materials Science & Technology.
KeywordMicrowave plasma enhanced CVD Diamond films Morphological transformation Electron field emission
Funding OrganizationNational Natural Science Foundation of China ; Shenyang Double-Hundreds Project
DOI10.1016/j.jmst.2018.04.021
Indexed BySCI
Language英语
Funding ProjectNational Natural Science Foundation of China[51202257] ; Shenyang Double-Hundreds Project[Z17-7-027] ; Shenyang Double-Hundreds Project[Z18-0-025]
WOS Research AreaMaterials Science ; Metallurgy & Metallurgical Engineering
WOS SubjectMaterials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS IDWOS:000443274500024
PublisherJOURNAL MATER SCI TECHNOL
Citation statistics
Cited Times:13[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/129223
Collection中国科学院金属研究所
Corresponding AuthorJiang, Xin
Affiliation1.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China
2.Univ Sci & Technol China, Sch Mat Sci & Engn, Hefei 230026, Anhui, Peoples R China
3.Univ Siegen, Inst Mat Engn, Paul Bonatz Str 9-11, D-57076 Siegen, Germany
Recommended Citation
GB/T 7714
Jia, Xinyi,Huang, Nan,Guo, Yuning,et al. Growth behavior of CVD diamond films with enhanced electron field emission properties over a wide range of experimental parameters[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2018,34(12):2398-2406.
APA Jia, Xinyi.,Huang, Nan.,Guo, Yuning.,Liu, Lusheng.,Li, Peng.,...&Jiang, Xin.(2018).Growth behavior of CVD diamond films with enhanced electron field emission properties over a wide range of experimental parameters.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,34(12),2398-2406.
MLA Jia, Xinyi,et al."Growth behavior of CVD diamond films with enhanced electron field emission properties over a wide range of experimental parameters".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 34.12(2018):2398-2406.
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