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Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique
Wang Tiegang1; Li Baisong1; Zhang Jiaojiao1; Tang Kuanyu1; Liu Yanmei1; Jiang Sumeng2
Corresponding AuthorWang Tiegang(sytgwang@163.com)
2018-08-01
Source PublicationRARE METAL MATERIALS AND ENGINEERING
ISSN1002-185X
Volume47Issue:8Pages:2578-2584
AbstractAl-Cr-Si-N coating was prepared by high power pulsed magnetron sputtering (HiPIMS) technique at different deposition temperatures. The effects of deposition temperature on the composition, microstructure, mechanical properties and tribological properties of the coatings were investigated. The results show that as the deposition temperature rises from 100 degrees C to 350 degrees C, the microstructure of the coating begins to evolve from amorphous to nanocrystals, and the fcc-AlN phase appears at 300 degrees C. The smoothness and compactness of the coating are progressively improved. The adhesive strength increases gradually, reaches the maximum value of 77 N at 300 degrees C and sharply decreases to 25 N at 350 degrees C due to the serious glow etching effect. The hardness of the coating increases gradually and reaches a maximum of 19.4 GPa at 350 degrees C. No columnar crystals are found and the residual stress decreases from -0.8 GPa to about -0.4 GPa.
KeywordHiPIMS Al-Cr-Si-N coating deposition temperature mechanical property friction coefficient
Indexed BySCI
Language英语
WOS Research AreaMaterials Science ; Metallurgy & Metallurgical Engineering
WOS SubjectMaterials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS IDWOS:000444219500048
PublisherNORTHWEST INST NONFERROUS METAL RESEARCH
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/129381
Collection中国科学院金属研究所
Corresponding AuthorWang Tiegang
Affiliation1.Tianjin Univ Technol & Educ, Tianjin Key Lab High Speed Cutting & Precis Mfg, Tianjin 300222, Peoples R China
2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China
Recommended Citation
GB/T 7714
Wang Tiegang,Li Baisong,Zhang Jiaojiao,et al. Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique[J]. RARE METAL MATERIALS AND ENGINEERING,2018,47(8):2578-2584.
APA Wang Tiegang,Li Baisong,Zhang Jiaojiao,Tang Kuanyu,Liu Yanmei,&Jiang Sumeng.(2018).Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique.RARE METAL MATERIALS AND ENGINEERING,47(8),2578-2584.
MLA Wang Tiegang,et al."Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique".RARE METAL MATERIALS AND ENGINEERING 47.8(2018):2578-2584.
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