| Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique | |
| Wang Tiegang1; Li Baisong1; Zhang Jiaojiao1; Tang Kuanyu1; Liu Yanmei1; Jiang Sumeng2 | |
| Corresponding Author | Wang Tiegang(sytgwang@163.com) |
| 2018-08-01 | |
| Source Publication | RARE METAL MATERIALS AND ENGINEERING
 |
| ISSN | 1002-185X |
| Volume | 47Issue:8Pages:2578-2584 |
| Abstract | Al-Cr-Si-N coating was prepared by high power pulsed magnetron sputtering (HiPIMS) technique at different deposition temperatures. The effects of deposition temperature on the composition, microstructure, mechanical properties and tribological properties of the coatings were investigated. The results show that as the deposition temperature rises from 100 degrees C to 350 degrees C, the microstructure of the coating begins to evolve from amorphous to nanocrystals, and the fcc-AlN phase appears at 300 degrees C. The smoothness and compactness of the coating are progressively improved. The adhesive strength increases gradually, reaches the maximum value of 77 N at 300 degrees C and sharply decreases to 25 N at 350 degrees C due to the serious glow etching effect. The hardness of the coating increases gradually and reaches a maximum of 19.4 GPa at 350 degrees C. No columnar crystals are found and the residual stress decreases from -0.8 GPa to about -0.4 GPa. |
| Keyword | HiPIMS Al-Cr-Si-N coating deposition temperature mechanical property friction coefficient |
| Indexed By | SCI |
| Language | 英语 |
| WOS Research Area | Materials Science ; Metallurgy & Metallurgical Engineering |
| WOS Subject | Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering |
| WOS ID | WOS:000444219500048 |
| Publisher | NORTHWEST INST NONFERROUS METAL RESEARCH |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/129381 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Wang Tiegang |
| Affiliation | 1.Tianjin Univ Technol & Educ, Tianjin Key Lab High Speed Cutting & Precis Mfg, Tianjin 300222, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China |
| Recommended Citation GB/T 7714 | Wang Tiegang,Li Baisong,Zhang Jiaojiao,et al. Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique[J]. RARE METAL MATERIALS AND ENGINEERING,2018,47(8):2578-2584. |
| APA | Wang Tiegang,Li Baisong,Zhang Jiaojiao,Tang Kuanyu,Liu Yanmei,&Jiang Sumeng.(2018).Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique.RARE METAL MATERIALS AND ENGINEERING,47(8),2578-2584. |
| MLA | Wang Tiegang,et al."Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique".RARE METAL MATERIALS AND ENGINEERING 47.8(2018):2578-2584. |
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