Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique

IMR OpenIR

	Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique
	Wang Tiegang 1; Li Baisong 1; Zhang Jiaojiao 1; Tang Kuanyu 1; Liu Yanmei 1; Jiang Sumeng 2
通讯作者	Wang Tiegang(sytgwang@163.com)
	2018-08-01
发表期刊	RARE METAL MATERIALS AND ENGINEERING
ISSN	1002-185X
卷号	47 期号:8 页码:2578-2584
摘要	Al-Cr-Si-N coating was prepared by high power pulsed magnetron sputtering (HiPIMS) technique at different deposition temperatures. The effects of deposition temperature on the composition, microstructure, mechanical properties and tribological properties of the coatings were investigated. The results show that as the deposition temperature rises from 100 degrees C to 350 degrees C, the microstructure of the coating begins to evolve from amorphous to nanocrystals, and the fcc-AlN phase appears at 300 degrees C. The smoothness and compactness of the coating are progressively improved. The adhesive strength increases gradually, reaches the maximum value of 77 N at 300 degrees C and sharply decreases to 25 N at 350 degrees C due to the serious glow etching effect. The hardness of the coating increases gradually and reaches a maximum of 19.4 GPa at 350 degrees C. No columnar crystals are found and the residual stress decreases from -0.8 GPa to about -0.4 GPa.
关键词	HiPIMS Al-Cr-Si-N coating deposition temperature mechanical property friction coefficient
收录类别	SCI
语种	英语
WOS研究方向	Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号	WOS:000444219500048
出版者	NORTHWEST INST NONFERROUS METAL RESEARCH
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/129381
专题	中国科学院金属研究所
通讯作者	Wang Tiegang
作者单位	1.Tianjin Univ Technol & Educ, Tianjin Key Lab High Speed Cutting & Precis Mfg, Tianjin 300222, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China
推荐引用方式 GB/T 7714	Wang Tiegang,Li Baisong,Zhang Jiaojiao,et al. Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique[J]. RARE METAL MATERIALS AND ENGINEERING,2018,47(8):2578-2584.
APA	Wang Tiegang,Li Baisong,Zhang Jiaojiao,Tang Kuanyu,Liu Yanmei,&Jiang Sumeng.(2018).Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique.RARE METAL MATERIALS AND ENGINEERING,47(8),2578-2584.
MLA	Wang Tiegang,et al."Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique".RARE METAL MATERIALS AND ENGINEERING 47.8(2018):2578-2584.