| Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering | |
| Wang Mei-Han1; Wen Jia-Xing1; Chen Yun1; Lei Hao2 | |
| Corresponding Author | Wang Mei-Han(wangmhdicp@aliyun.com) |
| 2018-12-20 | |
| Source Publication | JOURNAL OF INORGANIC MATERIALS
 |
| ISSN | 1000-324X |
| Volume | 33Issue:12Pages:1303-1308 |
| Abstract | Nano-structured tungsten oxide (WO3) thin films were deposited at room temperature by glancing angle reactive magnetron sputtering and then annealed at 450 degrees C in air. The films were characterized by field-emission scanning electron microscope (FE-SEM) and X-ray diffraction (XRD). The WO3 thin film deposited by DC magnetron sputtering at 80 degrees glancing angle exhibited oblique nano-column structure, while deposited by pulsed DC magnetron sputtering at the same angle exhibits nano-pore structure. After annealing at 450 degrees C for 3 h, the oblique nanocolums are conjunct with each other but the nano-pore structured remains with bigger pore size. XRD analysis reveals that WO3 thin films deposited at room temperature demonstrate amorphous structure. The amorphous structure will transfers to monoclinic phase after annealing at 450 degrees C for 1 h. Transmittance difference between colorization and bleaching of nano-structured WO3 thin film reaches 60% at wavelength of 600 nm. Electrochromic properties of nano-structured WO3 thin films are highly reversible. |
| Keyword | WO3 thin films nano-structured glancing angle magnetron sputtering |
| Funding Organization | National Natural Science Foundation of China ; Program for Liaoning Excellent Talents in University |
| DOI | 10.15541/jim20180130 |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | National Natural Science Foundation of China[51302175] ; Program for Liaoning Excellent Talents in University[LJQ2014132] |
| WOS Research Area | Materials Science |
| WOS Subject | Materials Science, Ceramics |
| WOS ID | WOS:000455987800005 |
| Publisher | SCIENCE PRESS |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/131135 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Wang Mei-Han |
| Affiliation | 1.Shenyang Univ, Sch Mech Engn, Shenyang 110044, Liaoning, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Surface Engn Mat Div, Shenyang 110016, Liaoning, Peoples R China |
| Recommended Citation GB/T 7714 | Wang Mei-Han,Wen Jia-Xing,Chen Yun,et al. Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering[J]. JOURNAL OF INORGANIC MATERIALS,2018,33(12):1303-1308. |
| APA | Wang Mei-Han,Wen Jia-Xing,Chen Yun,&Lei Hao.(2018).Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering.JOURNAL OF INORGANIC MATERIALS,33(12),1303-1308. |
| MLA | Wang Mei-Han,et al."Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering".JOURNAL OF INORGANIC MATERIALS 33.12(2018):1303-1308. |
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