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A detailed study on the Fe-doped TiO2 thin films induced by pulsed laser deposition route
Meng, Lijian1,3,4; Wang, Zhenhua2; Yang, Liang2; Ren, Weijun2; Liu, Wei2; Zhang, Zhidong2; Yang, Tao5,6; dos Santos, M. P.7,8
通讯作者Meng, Lijian(ljm@isep.ipp.pt) ; Yang, Tao(yangtao@ua.pt)
2019-04-30
发表期刊APPLIED SURFACE SCIENCE
ISSN0169-4332
卷号474页码:211-217
摘要Fe-doped TiO2 thin films are deposited both on the (100) oriented Si and glass substrates by pulsed laser deposition technique using Fe powder doped TiO2 ceramic target. The structural and optical properties of the film have been studied in detail. The degree of film crystallinity is investigated by X-ray diffraction and confirmed by Raman scattering measurements. The stoichiometry and chemical states of Fe, Ti and O are probed by X-ray photoelectron spectroscopy. The surface morphologies are observed by Scanning electron microscopy. The optical properties are studied by measuring the transmittance and the optical constants, the refractive index and the extinction coefficient. It is found that the substrate temperature is a key factor in determining the thin film structure which further influences the refractive index and the optical band gap of the film. An anatase structure emerges above 300 degrees C while the rutile structure appears when the substrate temperature is higher than 500 degrees C. Another result is that Fe exists in the deposited films as Fe3+ and the atomic concentration of Fe in the films is much lower than that in the source target. (C) 2018 Elsevier B. V. All rights reserved.
关键词Fe-doped TiO2 Structural properties Optical properties PLD Thin Film
DOI10.1016/j.apsusc.2018.03.043
收录类别SCI
语种英语
WOS研究方向Chemistry ; Materials Science ; Physics
WOS类目Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
WOS记录号WOS:000458478700027
出版者ELSEVIER SCIENCE BV
引用统计
被引频次:30[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/131557
专题中国科学院金属研究所
通讯作者Meng, Lijian; Yang, Tao
作者单位1.Xian Univ Architecture & Technol, Sch Mat & Mineral Resources, Funct Mat Lab, Xian, Shaanxi, Peoples R China
2.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Beijing, Peoples R China
3.Inst Politecn Porto, Inst Super Engn Porto, Dept Fis, Porto, Portugal
4.Inst Politecn Porto, Inst Super Engn Porto, Ctr Innovat Engn & Ind Technol, Porto, Portugal
5.Chinese Acad Sci, Key Lab Biofuels, Qingdao Inst Bioenergy & Bioproc Technol, Beijing, Peoples R China
6.Univ Aveiro, Dept Mech Engn, TEMA, Aveiro, Portugal
7.Univ Nova Lisboa, CEFITEC, Lisbon, Portugal
8.Univ Evora, Dept Fis, Evora, Portugal
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Meng, Lijian,Wang, Zhenhua,Yang, Liang,et al. A detailed study on the Fe-doped TiO2 thin films induced by pulsed laser deposition route[J]. APPLIED SURFACE SCIENCE,2019,474:211-217.
APA Meng, Lijian.,Wang, Zhenhua.,Yang, Liang.,Ren, Weijun.,Liu, Wei.,...&dos Santos, M. P..(2019).A detailed study on the Fe-doped TiO2 thin films induced by pulsed laser deposition route.APPLIED SURFACE SCIENCE,474,211-217.
MLA Meng, Lijian,et al."A detailed study on the Fe-doped TiO2 thin films induced by pulsed laser deposition route".APPLIED SURFACE SCIENCE 474(2019):211-217.
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