IMR OpenIR
Effect of Nitrogen Doping on Microstructure and Wear Resistance of Tantalum Coatings Deposited by Direct Current Magnetron Sputtering
Yang Shasha1,2; Yang Feng3; Chen Minghui4; Niu Yunsong1; Zhu Shenglong1; Wang Fuhui4
Corresponding AuthorChen Minghui(mhchen@mail.neu.edu.cn)
2019-03-11
Source PublicationACTA METALLURGICA SINICA
ISSN0412-1961
Volume55Issue:3Pages:308-316
AbstractTantalum coating attracts increasing attention in heat, corrosion and wear resistant applications today because of its high melting point, immunity to chemical attack and high toughness. Recently, tantalum has been considered a desirable candidate to replace electrodeposited (ED) chromium coating which is often used as protective coating against corrosion and wear. However, the wastes associated with ED chromium contain a well-known carcinogen, i.e. hexavalent chromium, which is a hazard to environment. In comparison, thick Ta coating is regarded as a more environmental and beneficial replacement. Tantalum coating is usually obtained by magnetron sputtering. However, tantalum exhibits two distinct crystalline phases. The body-centered cubic a-phase is the common phase in bulk metal and thermodynamically stable. alpha-Ta with good ductility and excellent mechanical properties is welcomed in most fields. beta-Ta is a metastable phase with tetragonal crystalline lattice structure. The properties of beta-Ta are not as advantageous as alpha-Ta because it is hard and brittle. The existence of beta-Ta may compromise tantalum coating in adhesion, corrosion and wear resistance, hence, finding appropriate deposition conditions to obtain pure alpha-phase Ta coating has attracted a lot of interests. In previous work, pure alpha-phase Ta coating has been deposited by direct current magnetron sputtering when substrates were located in negative glow space. In this work, nitrogen was mixed in sputtering gases to deposit Ta coating with N interstitially dissolved on stainless steel. Effect of N on microstructure, mechanical and tribological performance of Ta coating was studied. Results indicated that when no nitrogen or very low flux of N-2 (l mL/s) were introduced in gas mixtures, alpha-phase Ta coating with coarse grains grew and revealed strong reflections of (211) and (110) diffraction peaks. When N-2 flow rate reached to 5 mL/s, Ta coating with N interstitially dissolved was obtained and revealed grain refinement and (110) preferred orientation of TaN 0.1 phase. Compared to a -phase Ta coating, N-doped tantalum coatings displayed excellent wear resistance for their high hardness and H-3/E-2 ratio (H-hardness, E-elastic modulus). The wear mechanism for alpha-Ta coating was abrasive wear, while that of N-doped Ta coating switched to adhesive wear.
KeywordTa coating magnetron sputtering nitrogen doping wear
DOI10.11900/0412.1961.2018.00136
Indexed BySCI
Language英语
WOS Research AreaMetallurgy & Metallurgical Engineering
WOS SubjectMetallurgy & Metallurgical Engineering
WOS IDWOS:000457467900002
PublisherSCIENCE PRESS
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/131563
Collection中国科学院金属研究所
Corresponding AuthorChen Minghui
Affiliation1.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China
2.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Liaoning, Peoples R China
3.Shenyang Ligong Univ, Sch Equipment Engn, Shenyang 110159, Liaoning, Peoples R China
4.Northeastern Univ, Shenyang Natl Key Lab Mat Sci, Shenyang 110819, Liaoning, Peoples R China
Recommended Citation
GB/T 7714
Yang Shasha,Yang Feng,Chen Minghui,et al. Effect of Nitrogen Doping on Microstructure and Wear Resistance of Tantalum Coatings Deposited by Direct Current Magnetron Sputtering[J]. ACTA METALLURGICA SINICA,2019,55(3):308-316.
APA Yang Shasha,Yang Feng,Chen Minghui,Niu Yunsong,Zhu Shenglong,&Wang Fuhui.(2019).Effect of Nitrogen Doping on Microstructure and Wear Resistance of Tantalum Coatings Deposited by Direct Current Magnetron Sputtering.ACTA METALLURGICA SINICA,55(3),308-316.
MLA Yang Shasha,et al."Effect of Nitrogen Doping on Microstructure and Wear Resistance of Tantalum Coatings Deposited by Direct Current Magnetron Sputtering".ACTA METALLURGICA SINICA 55.3(2019):308-316.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Yang Shasha]'s Articles
[Yang Feng]'s Articles
[Chen Minghui]'s Articles
Baidu academic
Similar articles in Baidu academic
[Yang Shasha]'s Articles
[Yang Feng]'s Articles
[Chen Minghui]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Yang Shasha]'s Articles
[Yang Feng]'s Articles
[Chen Minghui]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.