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Femtosecond Laser-Etched MXene Microsupercapacitors with Double-Side Configuration via Arbitrary On- and Through-Substrate Connections
Li, Qiang1,2; Wang, Qizhao3; Li, Linlin2; Yang, Lijun1,2; Wang, Yang1,2; Wang, Xiaohui4; Fang, Hai-Tao3
Corresponding AuthorYang, Lijun(yljtj@hit.edu.cn) ; Wang, Xiaohui(wang@imr.ac.cn) ; Fang, Hai-Tao(htfang@hit.edu.cn)
2020-05-04
Source PublicationADVANCED ENERGY MATERIALS
ISSN1614-6832
Volume10Issue:24Pages:8
AbstractThe capacitance of microsupercapacitors (MSCs) can double if both sides of substrates are used to construct MSCs. Nevertheless, achieving electric connections of MSCs through substrates is a challenge due to the difficulty in precisely positioning each MSC couple that has two of the same MSCs units on two sides. In this work, taking advantage of the synchronous etching on both sides of transparent polyethylene terephthalate substrates by femtosecond laser pulses, a double-sided configuration is attained with high precision in the alignment of back-to-back MSC couples and versatile double-side MSCs are realized via arbitrary on- and through-substrate connections of MXene MSC units. The MXene double-side MSC fabricated by the series connection of 12 spiral pattern MXene MSC units with interdigital electrodes of 10 mu m width interspace can output a large working voltage of 7.2 V. Additionally, femtosecond laser etching brings the transformation of MXene into titania near-etched edges with a lateral distance less than 1 mu m. Such a small laser-affected area has little influence on the capacitive performance, which is one of advantages for femtosecond laser over conventional lasers. This research is valuable for one-step manufacturing of highly integrated MSCs in the field of miniaturized energy storage systems.
Keyworddouble-sided femtosecond laser etching high integration microsupercapacitors MSCs MXene MSCs
Funding OrganizationNational Key R&D Program of China
DOI10.1002/aenm.202000470
Indexed BySCI
Language英语
Funding ProjectNational Key R&D Program of China[2018YFB1107600]
WOS Research AreaChemistry ; Energy & Fuels ; Materials Science ; Physics
WOS SubjectChemistry, Physical ; Energy & Fuels ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
WOS IDWOS:000530456900001
PublisherWILEY-V C H VERLAG GMBH
Citation statistics
Cited Times:12[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/138718
Collection中国科学院金属研究所
Corresponding AuthorYang, Lijun; Wang, Xiaohui; Fang, Hai-Tao
Affiliation1.Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Heilongjiang, Peoples R China
2.Harbin Inst Technol, Sch Mechatron Engn, Harbin 150001, Heilongjiang, Peoples R China
3.Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Heilongjiang, Peoples R China
4.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
Recommended Citation
GB/T 7714
Li, Qiang,Wang, Qizhao,Li, Linlin,et al. Femtosecond Laser-Etched MXene Microsupercapacitors with Double-Side Configuration via Arbitrary On- and Through-Substrate Connections[J]. ADVANCED ENERGY MATERIALS,2020,10(24):8.
APA Li, Qiang.,Wang, Qizhao.,Li, Linlin.,Yang, Lijun.,Wang, Yang.,...&Fang, Hai-Tao.(2020).Femtosecond Laser-Etched MXene Microsupercapacitors with Double-Side Configuration via Arbitrary On- and Through-Substrate Connections.ADVANCED ENERGY MATERIALS,10(24),8.
MLA Li, Qiang,et al."Femtosecond Laser-Etched MXene Microsupercapacitors with Double-Side Configuration via Arbitrary On- and Through-Substrate Connections".ADVANCED ENERGY MATERIALS 10.24(2020):8.
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