Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon

IMR OpenIR

	Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon
其他题名	Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon
	Wang Minghai 1; Wang Ben 1; Zheng Yaohui 1
	2015
发表期刊	Chinese Journal of Aeronautics
ISSN	1000-9361
卷号	28 期号:4 页码:1273-1280
摘要	Ultra-precision machining causes materials to undergo a greatly strained deformation process in a short period of time. The effect of shear strain rates on machining quality, in particular on surface anisotropy, is a topic deserving of research that has thus far been overlooked. This study analyzes the impact of the strain rate during the ultra-precision turning of single-crystal silicon on the anisotropy of surface roughness. Focusing on the establishment of cutting models considering the tool rake angle and the edge radius, this is the first research that takes into account the strain rate dislocation emission criteria in studying the effects of the edge radius, the cutting speed, and the cutting thickness on the plastic deformation of single-crystal silicon. The results of this study show that the uses of a smaller edge radius, faster cutting speeds, and a reduced cutting thickness can result in optimally uniform surface roughness, while the use of a very sharp cutting tool is essential when operating with smaller cutting thicknesses. A further finding is that insufficient plastic deformation is the major cause of increased surface roughness in the ultra-precision turning of brittle materials. On this basis, we propose that the capacity of single-crystal silicon to emit dislocations be improved as much as possible before brittle fracture occurs, thereby promoting plastic deformation and minimizing the anisotropy of surface roughness in the machined workpiece.
其他摘要	Ultra-precision machining causes materials to undergo a greatly strained deformation process in a short period of time. The effect of shear strain rates on machining quality, in particular on surface anisotropy, is a topic deserving of research that has thus far been overlooked. This study analyzes the impact of the strain rate during the ultra-precision turning of single-crystal silicon on the anisotropy of surface roughness. Focusing on the establishment of cutting models considering the tool rake angle and the edge radius, this is the first research that takes into account the strain rate dislocation emission criteria in studying the effects of the edge radius, the cutting speed, and the cutting thickness on the plastic deformation of single-crystal silicon. The results of this study show that the uses of a smaller edge radius, faster cutting speeds, and a reduced cutting thickness can result in optimally uniform surface roughness, while the use of a very sharp cutting tool is essential when operating with smaller cutting thicknesses. A further finding is that insufficient plastic deformation is the major cause of increased surface roughness in the ultra-precision turning of brittle materials. On this basis, we propose that the capacity of single-crystal silicon to emit dislocations be improved as much as possible before brittle fracture occurs, thereby promoting plastic deformation and minimizing the anisotropy of surface roughness in the machined workpiece.
关键词	Anisotropy of surface roughness Cutting speed Edge radius Single-crystal silicon Strain rate Ultra-precision turning Weakening Motor vehicles. Aeronautics. Astronautics TL1-4050
收录类别	CSCD
语种	英语
资助项目	[National Defence Scientific Research of China]
CSCD记录号	CSCD:5498229
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/142563
专题	中国科学院金属研究所
作者单位	1.中国科学院金属研究所 2.Beijing University Aeronaut & Astronaut, Sch Mech Engn & Automat, Beijing 100191, Peoples R China
推荐引用方式 GB/T 7714	Wang Minghai,Wang Ben,Zheng Yaohui. Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon[J]. Chinese Journal of Aeronautics,2015,28(4):1273-1280.
APA	Wang Minghai,Wang Ben,&Zheng Yaohui.(2015).Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon.Chinese Journal of Aeronautics,28(4),1273-1280.
MLA	Wang Minghai,et al."Weakening of the anisotropy of surface roughness in ultra-precision turning of single-crystal silicon".Chinese Journal of Aeronautics 28.4(2015):1273-1280.