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大功率CO2激光沉积超硬Si3N4膜的性能和组织
冯钟潮; 郭良; 梁勇; 韩健; 侯万良; 宁小光
1992
Source Publication金属学报
ISSN0412-1961
Volume28.0Issue:008Pages:B351-B355
KeywordSi3N4膜 组织结构 硬度 耐磨 LCVD
Indexed ByCSCD
Language中文
CSCD IDCSCD:937076
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/143874
Collection中国科学院金属研究所
Affiliation中国科学院金属研究所
Recommended Citation
GB/T 7714
冯钟潮,郭良,梁勇,等. 大功率CO2激光沉积超硬Si3N4膜的性能和组织[J]. 金属学报,1992,28.0(008):B351-B355.
APA 冯钟潮,郭良,梁勇,韩健,侯万良,&宁小光.(1992).大功率CO2激光沉积超硬Si3N4膜的性能和组织.金属学报,28.0(008),B351-B355.
MLA 冯钟潮,et al."大功率CO2激光沉积超硬Si3N4膜的性能和组织".金属学报 28.0.008(1992):B351-B355.
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