大功率CO2激光沉积超硬Si3N4膜的性能和组织

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	大功率CO2激光沉积超硬Si3N4膜的性能和组织
	冯钟潮; 郭良; 梁勇; 韩健; 侯万良; 宁小光
	1992
Source Publication	金属学报
ISSN	0412-1961
Volume	28.0 Issue:008 Pages:B351-B355
Keyword	Si3N4膜组织结构硬度耐磨 LCVD
Indexed By	CSCD
Language	中文
CSCD ID	CSCD:937076
Citation statistics	Cited Times:1[CSCD] [CSCD Record]
Document Type	期刊论文
Identifier	http://ir.imr.ac.cn/handle/321006/143874
Collection	中国科学院金属研究所
Affiliation	中国科学院金属研究所
Recommended Citation GB/T 7714	冯钟潮,郭良,梁勇,等. 大功率CO2激光沉积超硬Si3N4膜的性能和组织[J]. 金属学报,1992,28.0(008):B351-B355.
APA	冯钟潮,郭良,梁勇,韩健,侯万良,&宁小光.(1992).大功率CO2激光沉积超硬Si3N4膜的性能和组织.金属学报,28.0(008),B351-B355.
MLA	冯钟潮,et al."大功率CO2激光沉积超硬Si3N4膜的性能和组织".金属学报 28.0.008(1992):B351-B355.

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