Microstructures of BiFeO3 /SrTiO3 Multiferroic multilayers prepared by magnetron sputtering were studied by transmission electron microscopy（TEM）.Electron diffraction and contrast analysis reveal a very clear and well separated layer sequence.The BiFeO3 /SrTiO3 multilayer is epitaxially grown on the substrate.The interface between the thin film and the substrate is sharp and distinct.High-angle angular dark-field imaging,elemental mapping and compositional analysis revealed that the compositions vary with the layer periodicity as expected.Due to the local composition inhomogeneity resulted from the sputtering process,it is found that interfaces become rough when increasing the thickness of the films.
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