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磁控溅射Fe—N薄膜的微结构研究
詹倩; 贺连龙; 李斗星
2002
Source Publication电子显微学报
ISSN1000-6281
Volume21.0Issue:005Pages:645-646
Keyword磁控溅射 Fe-N薄膜 微结构 磁学性能 晶粒尺寸 厚度 透射电镜 磁头
Indexed ByCSCD
Language中文
CSCD IDCSCD:980962
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/147468
Collection中国科学院金属研究所
Affiliation中国科学院金属研究所
Recommended Citation
GB/T 7714
詹倩,贺连龙,李斗星. 磁控溅射Fe—N薄膜的微结构研究[J]. 电子显微学报,2002,21.0(005):645-646.
APA 詹倩,贺连龙,&李斗星.(2002).磁控溅射Fe—N薄膜的微结构研究.电子显微学报,21.0(005),645-646.
MLA 詹倩,et al."磁控溅射Fe—N薄膜的微结构研究".电子显微学报 21.0.005(2002):645-646.
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