IMR OpenIR
ArF准分子激光晶化非晶硅薄膜微结构研究
Alternative TitleResearches on the Microstructure of a-Si Film Crystallized by ArF Excimer Laser
黄香平1; 崔连武2; 肖金泉2; 闻火3; 闻立时1
2010
Source Publication世界科技研究与发展
ISSN1006-6055
Volume000Issue:004Pages:417-419,426
Abstract利用ArF准分子激光对非晶硅薄膜的表层进行晶化后,采用拉曼光谱(Raman)、透射电镜(TEM)、场发射扫描电子显微镜(FE—SEM)等实验方法研究不同激光能量密度下晶化层硅薄膜微结构变化。实验结果表明:随激光能量密度的增大,薄膜结晶度增大,晶化层厚度加厚;晶粒尺寸则是先增大,直到激光能量密度增大到210mJ/cm^2后,晶粒尺寸开始减小并且均匀性逐渐变差。最佳的激光能量密度范围为120~180mJ/cm^2,这时薄膜表面晶化层晶粒比较均匀致密,薄膜质量较好。
Other AbstractArF excimer laser is used to crystallize the surface layer of a-St thin film. The microstructure variation under different laser fluences is investigated using Raman spectrum, transmission electron microscopy (TEM), and field emission-scanning electron microscopy (FESEM). The results indicate that the crystallinity and the thickness of the crystallized surface films increase with laser fluences. The grain size increases with laser fluences below 210 mJ/cm^2 and decreases with homogeneity deteriorating above. The best crystallized surface layer with homogeneous grain size is found to be with the laser fluence in 120 - 180 mJ/cm^2.
Keyword准分子激光 激光能量 结晶度
Indexed ByCSCD
Language中文
CSCD IDCSCD:3985866
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/148117
Collection中国科学院金属研究所
Affiliation1.中南大学
2.中国科学院金属研究所
3.武汉华硅太阳能科技有限责任公司
Recommended Citation
GB/T 7714
黄香平,崔连武,肖金泉,等. ArF准分子激光晶化非晶硅薄膜微结构研究[J]. 世界科技研究与发展,2010,000(004):417-419,426.
APA 黄香平,崔连武,肖金泉,闻火,&闻立时.(2010).ArF准分子激光晶化非晶硅薄膜微结构研究.世界科技研究与发展,000(004),417-419,426.
MLA 黄香平,et al."ArF准分子激光晶化非晶硅薄膜微结构研究".世界科技研究与发展 000.004(2010):417-419,426.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[黄香平]'s Articles
[崔连武]'s Articles
[肖金泉]'s Articles
Baidu academic
Similar articles in Baidu academic
[黄香平]'s Articles
[崔连武]'s Articles
[肖金泉]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[黄香平]'s Articles
[崔连武]'s Articles
[肖金泉]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.