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喷墨打印制备的SnO2薄膜的气敏特性
沈文锋; 赵岩; 张彩碚
2003
Source Publication传感器技术
ISSN1000-9787
Volume22.0Issue:1.0Pages:5-8
Abstract简介了喷墨打印制备薄膜技术的优势与特点,配制了SnO2前驱溶液墨水,并利用该技术在金叉指氧化铝基片上喷镀SnO2前驱溶液墨水,而制得了SnO2气敏薄膜元件。利用XRD分析了SnO2薄膜的晶体结构。通过控制喷打墨水的次数,方便地控制了最终薄膜的厚度。并初步探讨了喷墨打印次数对最终薄膜元件性能的影响。当薄膜只喷打一次时,具有极高的电阻值,而且灵敏度比较低。而随着喷打次数的增加,即薄膜厚度的提高,薄膜电阻也随之降低,并对乙醇具有较好的气敏性能。
Keyword喷墨打印 制备 SnO2薄膜 气敏特性 二氧化锡 气敏薄膜
Indexed ByCSCD
Language中文
CSCD IDCSCD:1355070
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/149021
Collection中国科学院金属研究所
Affiliation中国科学院金属研究所
Recommended Citation
GB/T 7714
沈文锋,赵岩,张彩碚. 喷墨打印制备的SnO2薄膜的气敏特性[J]. 传感器技术,2003,22.0(1.0):5-8.
APA 沈文锋,赵岩,&张彩碚.(2003).喷墨打印制备的SnO2薄膜的气敏特性.传感器技术,22.0(1.0),5-8.
MLA 沈文锋,et al."喷墨打印制备的SnO2薄膜的气敏特性".传感器技术 22.0.1.0(2003):5-8.
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