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Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process
Alternative TitleResearch on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process
Jin Jiang1; Li Na1; Xu Lu2; Wang Bo1; Jin Huiliang1
2013
Source PublicationSPECTROSCOPY AND SPECTRAL ANALYSIS
ISSN1000-0593
Volume33Issue:2Pages:535-539
AbstractIn the reaction of the atmospheric pressure plasma process, the heat stable process of the atmospheric pressure plasma jet has a direct impact on the removal rate, CF4 is the provider of active F* atom, O-2 is important auxiliary gas, and they play an important role in the process. In order to research the rule of the concentration of the 3 parameters upon the atmospheric pressure plasma processing, the atmospheric pressure plasma jet was used for processing and the spectrometer was used to monitor the changes in the process. The experiment indicates that: when the heat is stable, the concentration of the active F* atom essentially remains unchanged; with increasing the concentration of gas CF4, the spectrum of the active F* atom has self-absorption phenomena, so using the atomic emission spectroscopy method to monitor the changes in the concentration of active F* atom generated by CF4 is not completely exact; because O-2 can easily react with the dissociation product of CF4, which inhibits the compound of the active F* atom, so in a certain range with increasing the concentration of gas O-2, the concentration of the active F* atom becomes strong.
KeywordAtmospheric pressure Atomic emission spectroscopy Material removal rate
Indexed ByCSCD
Language英语
CSCD IDCSCD:4745243
Citation statistics
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/155820
Collection中国科学院金属研究所
Affiliation1.Harbin Institute Technol, Ctr Precis Engn, Harbin 150001, Peoples R China
2.中国科学院金属研究所
Recommended Citation
GB/T 7714
Jin Jiang,Li Na,Xu Lu,et al. Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS,2013,33(2):535-539.
APA Jin Jiang,Li Na,Xu Lu,Wang Bo,&Jin Huiliang.(2013).Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process.SPECTROSCOPY AND SPECTRAL ANALYSIS,33(2),535-539.
MLA Jin Jiang,et al."Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process".SPECTROSCOPY AND SPECTRAL ANALYSIS 33.2(2013):535-539.
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