Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process

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	Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process
其他题名	Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process
	Jin Jiang 1; Li Na 1; Xu Lu 2; Wang Bo 1; Jin Huiliang 1
	2013
发表期刊	SPECTROSCOPY AND SPECTRAL ANALYSIS
ISSN	1000-0593
卷号	33 期号:2 页码:535-539
摘要	In the reaction of the atmospheric pressure plasma process, the heat stable process of the atmospheric pressure plasma jet has a direct impact on the removal rate, CF4 is the provider of active F* atom, O-2 is important auxiliary gas, and they play an important role in the process. In order to research the rule of the concentration of the 3 parameters upon the atmospheric pressure plasma processing, the atmospheric pressure plasma jet was used for processing and the spectrometer was used to monitor the changes in the process. The experiment indicates that: when the heat is stable, the concentration of the active F* atom essentially remains unchanged; with increasing the concentration of gas CF4, the spectrum of the active F* atom has self-absorption phenomena, so using the atomic emission spectroscopy method to monitor the changes in the concentration of active F* atom generated by CF4 is not completely exact; because O-2 can easily react with the dissociation product of CF4, which inhibits the compound of the active F* atom, so in a certain range with increasing the concentration of gas O-2, the concentration of the active F* atom becomes strong.
关键词	Atmospheric pressure Atomic emission spectroscopy Material removal rate
收录类别	CSCD
语种	英语
CSCD记录号	CSCD:4745243
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/155820
专题	中国科学院金属研究所
作者单位	1.Harbin Institute Technol, Ctr Precis Engn, Harbin 150001, Peoples R China 2.中国科学院金属研究所
推荐引用方式 GB/T 7714	Jin Jiang,Li Na,Xu Lu,et al. Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS,2013,33(2):535-539.
APA	Jin Jiang,Li Na,Xu Lu,Wang Bo,&Jin Huiliang.(2013).Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process.SPECTROSCOPY AND SPECTRAL ANALYSIS,33(2),535-539.
MLA	Jin Jiang,et al."Research on the Atomic Emission Spectroscopy of Atmospheric Pressure Plasma Process".SPECTROSCOPY AND SPECTRAL ANALYSIS 33.2(2013):535-539.