| Ti／TiN多层膜显微结构的研究 | |
| 黄荣芳; 郭丽萍; 宫骏; 于宝海; 闻立时 | |
| 1992 | |
| Source Publication | 硅酸盐学报
 |
| ISSN | 0454-5648 |
| Volume | 20.0Issue:005Pages:404-409 |
| Keyword | 钛 氮化钛 膜 晶粒 显微构造 |
| Indexed By | CSCD |
| Language | 中文 |
| CSCD ID | CSCD:176179 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/156785 |
| Collection | 中国科学院金属研究所 |
| Affiliation | 中国科学院金属研究所 |
| Recommended Citation GB/T 7714 | 黄荣芳,郭丽萍,宫骏,等. Ti／TiN多层膜显微结构的研究[J]. 硅酸盐学报,1992,20.0(005):404-409. |
| APA | 黄荣芳,郭丽萍,宫骏,于宝海,&闻立时.(1992).Ti／TiN多层膜显微结构的研究.硅酸盐学报,20.0(005),404-409. |
| MLA | 黄荣芳,et al."Ti／TiN多层膜显微结构的研究".硅酸盐学报 20.0.005(1992):404-409. |
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