An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM

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	An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM
其他题名	An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM
	Wei YangJie 1; Wu ChengDong 1; Dong ZaiLi 2
	2011
发表期刊	SCIENCE CHINA-TECHNOLOGICAL SCIENCES
ISSN	1674-7321
卷号	54 期号:9 页码:2397-2403
摘要	Atomic force microscope (AFM), as an important instrument in micro/nano operation, has been widely used to measure sample's height information. However, the so called compression effect, due to force aroused from the contact of AFM tip with a sample surface, would result in imprecision of the surface's height measurement, i.e., the measured height is lower than expected. Up to now, there is not any effective and rapid method to attenuate this kind of measurement error. Thus, in this paper, an algorithm to obtain high accurate height measurement is proposed. Firstly, the concept of force curve is used to analyze the basic principle of the compression effect. Secondly, an automatic compensation method by fusing the height signal and the deflection signal is proposed. The proposed algorithm can also be used to obtain a surface elasticity image. Finally, in order to validate the proposed method, two experiments are conducted with respect to mutli-wall nano-carbon tubes on a silicon substrate and graphemes on a mica substrate.
其他摘要	Atomic force microscope (AFM), as an important instrument in micro/nano operation, has been widely used to measure sample's height information. However, the so called compression effect, due to force aroused from the contact of AFM tip with a sample surface, would result in imprecision of the surface's height measurement, i.e., the measured height is lower than expected. Up to now, there is not any effective and rapid method to attenuate this kind of measurement error. Thus, in this paper, an algorithm to obtain high accurate height measurement is proposed. Firstly, the concept of force curve is used to analyze the basic principle of the compression effect. Secondly, an automatic compensation method by fusing the height signal and the deflection signal is proposed. The proposed algorithm can also be used to obtain a surface elasticity image. Finally, in order to validate the proposed method, two experiments are conducted with respect to mutli-wall nano-carbon tubes on a silicon substrate and graphemes on a mica substrate.
关键词	ATOMIC-FORCE MICROSCOPY CARBON NANOTUBES atomic force microscope (AFM) compression effect information fusion surface elasticity
收录类别	CSCD
语种	英语
资助项目	[CAS]
CSCD记录号	CSCD:4424509
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/156833
专题	中国科学院金属研究所
作者单位	1.中国科学院金属研究所 2.中国科学院
推荐引用方式 GB/T 7714	Wei YangJie,Wu ChengDong,Dong ZaiLi. An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM[J]. SCIENCE CHINA-TECHNOLOGICAL SCIENCES,2011,54(9):2397-2403.
APA	Wei YangJie,Wu ChengDong,&Dong ZaiLi.(2011).An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM.SCIENCE CHINA-TECHNOLOGICAL SCIENCES,54(9),2397-2403.
MLA	Wei YangJie,et al."An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM".SCIENCE CHINA-TECHNOLOGICAL SCIENCES 54.9(2011):2397-2403.