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Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering
Shi, W. B.1,2; Liu, Y. M.3; Li, W. H.1,2; Liu, J. H.1,2; Lei, H.1; Gong, J.1; Sun, C.1
Corresponding AuthorSun, C.(csun@imr.ac.cn)
2021-07-15
Source PublicationCERAMICS INTERNATIONAL
ISSN0272-8842
Volume47Issue:14Pages:19678-19686
AbstractWB2/Cr multilayer films with different modulation ratios (lambda = 1, 3, 5, 7, 12, and 20) were deposited by a combination of direct-current and pulse direct-current magnetron sputtering, and the number of bilayers was fixed at ten. The effect of the modulation ratio on the microstructure, mechanical and tribological properties of the multilayer films was investigated in detail. X-ray diffraction demonstrates that a preferred orientation of WB2 (101) and Cr (110) exists, and WB2 (101) dominates the film's growth with increasing of modulation ratio. The TEM results show that the multilayer films consist of nanograins dispersed in an amorphous matrix in WB2 layers and polycrystalline grains in Cr layers. The hardness increases with the increasing modulation ratio, and the maximum hardness (31.1 GPa) is obtained at lambda = 20. The indentation toughness presents an opposite changing trend, and the maximum indentation toughness (1.264 MPa m(1/2)) is obtained in S1 at lambda = 1 which conforms to the rule of mixture due to the relatively thick bilayer thickness (Lambda = 160-192 nm). The wear mechanism is investigated, and the results suggest that the multilayer film with lambda = 7 possesses the best wear resistance (2.06 x 10(-7) mm(3)/Nm), benefiting from the balance of hardness and indentation toughness.
KeywordWB2/Cr multilayer Modulation ratio Indentation toughness Tribological behavior
Funding OrganizationNatural Science Foundation of China
DOI10.1016/j.ceramint.2021.03.305
Indexed BySCI
Language英语
Funding ProjectNatural Science Foundation of China[51701157]
WOS Research AreaMaterials Science
WOS SubjectMaterials Science, Ceramics
WOS IDWOS:000663793100003
PublisherELSEVIER SCI LTD
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.imr.ac.cn/handle/321006/160531
Collection中国科学院金属研究所
Corresponding AuthorSun, C.
Affiliation1.Chinese Acad Sci, Shi Changxu Innovat Ctr Adv Mat, Inst Met Res, 72 Wenhua Rd, Shenyang 110016, Peoples R China
2.Univ Sci & Technol China, Sch Mat Sci & Engn, 72 Wenhua Rd, Shenyang 110016, Peoples R China
3.Xian Shiyou Univ, Coll Mat Sci & Engn, Xian 710065, Peoples R China
Recommended Citation
GB/T 7714
Shi, W. B.,Liu, Y. M.,Li, W. H.,et al. Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering[J]. CERAMICS INTERNATIONAL,2021,47(14):19678-19686.
APA Shi, W. B..,Liu, Y. M..,Li, W. H..,Liu, J. H..,Lei, H..,...&Sun, C..(2021).Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering.CERAMICS INTERNATIONAL,47(14),19678-19686.
MLA Shi, W. B.,et al."Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering".CERAMICS INTERNATIONAL 47.14(2021):19678-19686.
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