Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering

doi:10.1016/j.ceramint.2021.03.305

IMR OpenIR

	Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering
	Shi, W. B.1,2; Liu, Y. M.3; Li, W. H.1,2; Liu, J. H.1,2; Lei, H.1; Gong, J.1; Sun, C.1
通讯作者	Sun, C.(csun@imr.ac.cn)
	2021-07-15
发表期刊	CERAMICS INTERNATIONAL
ISSN	0272-8842
卷号	47 期号:14 页码:19678-19686
摘要	WB2/Cr multilayer films with different modulation ratios (lambda = 1, 3, 5, 7, 12, and 20) were deposited by a combination of direct-current and pulse direct-current magnetron sputtering, and the number of bilayers was fixed at ten. The effect of the modulation ratio on the microstructure, mechanical and tribological properties of the multilayer films was investigated in detail. X-ray diffraction demonstrates that a preferred orientation of WB2 (101) and Cr (110) exists, and WB2 (101) dominates the film's growth with increasing of modulation ratio. The TEM results show that the multilayer films consist of nanograins dispersed in an amorphous matrix in WB2 layers and polycrystalline grains in Cr layers. The hardness increases with the increasing modulation ratio, and the maximum hardness (31.1 GPa) is obtained at lambda = 20. The indentation toughness presents an opposite changing trend, and the maximum indentation toughness (1.264 MPa m(1/2)) is obtained in S1 at lambda = 1 which conforms to the rule of mixture due to the relatively thick bilayer thickness (Lambda = 160-192 nm). The wear mechanism is investigated, and the results suggest that the multilayer film with lambda = 7 possesses the best wear resistance (2.06 x 10(-7) mm(3)/Nm), benefiting from the balance of hardness and indentation toughness.
关键词	WB2/Cr multilayer Modulation ratio Indentation toughness Tribological behavior
资助者	Natural Science Foundation of China
DOI	10.1016/j.ceramint.2021.03.305
收录类别	SCI
语种	英语
资助项目	Natural Science Foundation of China[51701157]
WOS研究方向	Materials Science
WOS类目	Materials Science, Ceramics
WOS记录号	WOS:000663793100003
出版者	ELSEVIER SCI LTD
引用统计	被引频次：13[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/160531
专题	中国科学院金属研究所
通讯作者	Sun, C.
作者单位	1.Chinese Acad Sci, Shi Changxu Innovat Ctr Adv Mat, Inst Met Res, 72 Wenhua Rd, Shenyang 110016, Peoples R China 2.Univ Sci & Technol China, Sch Mat Sci & Engn, 72 Wenhua Rd, Shenyang 110016, Peoples R China 3.Xian Shiyou Univ, Coll Mat Sci & Engn, Xian 710065, Peoples R China
推荐引用方式 GB/T 7714	Shi, W. B.,Liu, Y. M.,Li, W. H.,et al. Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering[J]. CERAMICS INTERNATIONAL,2021,47(14):19678-19686.
APA	Shi, W. B..,Liu, Y. M..,Li, W. H..,Liu, J. H..,Lei, H..,...&Sun, C..(2021).Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering.CERAMICS INTERNATIONAL,47(14),19678-19686.
MLA	Shi, W. B.,et al."Effects of modulation ratio on the microstructure, mechanical and tribological properties of WB2/Cr multilayer films deposited by magnetron sputtering".CERAMICS INTERNATIONAL 47.14(2021):19678-19686.