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电迁移导致SnBi焊料互连结构中的界面转变:溶质偏析及其抑制和金属间化合物的形成
其他题名Electromigration-induced Interfacial Transformations in SnBi Solder Interconnects: Solute Segregation, Segregation Inhibition, and Intermetallics Formation
杨启亮
学位类型博士
导师尚建库
2009-05-26
学位授予单位中国科学院金属研究所
学位授予地点金属研究所
学位专业材料学
关键词电迁移 偏析 界面 Sn-bi焊料 化学镀ni-p 抑制 Sb
摘要随着电子产品向便携化、小型化、高性能化发展,集成电路的密度持续升高,相应的焊点中的电流密度也越来越高。在如此高密度电流作用下,焊料/基体界面附近焊料组织的变化以及焊料/基体界面本身组织的变化对于焊点结构的稳定性至关重要。本论文主要研究了高密度电流(>104A/cm2)对Sn-Bi/基体互连结构界面组织、可靠性的影响。由于Bi元素本身的脆性,通电中Bi元素往阳极界面的迁移对焊点的力学可靠性能造成了潜在的影响,对此研究了抑制Bi元素迁移的方法。高密度电流除了使Bi元素迁移外,对Sn/Ni-P互连结构中的阴、阳两极界面处金属间化合物的组织也有着甚大的影响。 在电流作用下,原位观察了Sn-Bi共晶中的Bi相迁移,并且在Sn-3.8Bi合金中分析了其迁移过程。在Sn-Bi共晶中,Bi相的溶解和析出过程同时发生,并在阳极金属间化合物前形成连续富Bi层,在阴极则形成富Sn相。通电后的Sn-Bi共晶/基体互连结构受到外力冲击时,会在连续富Bi层中发生断裂。由Sn-Bi共晶中的Bi相迁移速率同电流密度的关系,得到了实验温度下Sn-Bi共晶的Blech乘积因子和 值,分别为 =393A/cm和-3.5×10-11cm2/s。 为了探索抑制Bi相迁移和延迟阳极界面金属间化合物前沿富Bi层形成的方法,研究了Pb和Sb在Sn-Bi合金中对通电条件下Bi元素迁移的影响。当3wt%的Pb加入Sn-3Bi合金后,Bi元素在阳极界面处的偏析得到抑制。分析表明,Pb原子和Bi原子反应生成Pb-Bi金属间化合物抑制了Bi在Sn相中的迁移。当不同的Sb含量(1wt%,3wt%,5wt%) 被添加入Sn-Bi共晶时,Bi元素往阳极界面迁移的速率随着Sb元素含量的增加而降低,并且在Sb含量达到3wt%时,Bi元素的迁移速率降低到最低点,此时其迁移速率为Sn-Bi共晶中的57%。 电迁移不仅对界面附近的焊料组织产生影响,对焊料/基体界面本身的组织结构也有影响。在对通电情况下Sn/Ni-P互连结构中Ni-Sn金属间化合物和富P层在阴、阳极界面处生长情况的研究中,发现Ni-Sn金属间化合物的厚度在阳极增厚,但在阴极减薄;富P层的厚度则在阴、阳两极均增厚,并且在阴极增厚的速率大于在阳极增厚的速率。在阴极,电流有助于柱状晶Ni12P5层的生长,而在阳极,电流有助于非柱状晶Ni12P5层的生长。
其他摘要As the trend of miniaturization, portability and high performance in electronic products goes forward, the assembly density is continuously increasing, which in turn increases the current density in the solder joints. Under high current density, the changes in the microstructure at the solder/substrate interface or near the solder/substrate interface become significant and crucial to the stability of the solder structure. The influence of high current density (>104A/cm2)on the intrerfacial microstructure evolution and reliability of Sn-Bi solder/substrate interconnects was investigated. Segregation of Bi to the anode interface caused a potential mechanical reliability for the interconnect because of Bi’s brittleness, and the following inhibition of Bi migration to the anode side was studied. Besides of Bi migration under high density current stressing, the growth and microstructure of intermetallic compound at the anode and cathode interface was greatly affected in Sn/Ni-P interconnects. Under current stressing, Bi migration process was in-situ observed in eutectic Sn-Bi sloder and analyzed in Sn-3.8Bi alloy. The dissolution and precipitation of Bi phase occurred at the same time in the eutectic Sn-Bi alloy, which determined the formation of the continuous Bi layer in front of IMC (intermetallic compounds) layer at the anode side and Sn-rich phase formed at the cathode side. It was found that fracture took place in the continuous Bi layer when eutectic Sn-Bi/substrate interconnects after current stressing experienced mechanical strike. By the relationship of Bi migration rate in eutectic Sn-Bi alloy and current density, the Blech product and the value of in eutectic Sn-Bi alloy at the experimental temperature are 393A/cm and -3.5×10-11cm2/s, respectively. In exploring measures to inhibit Bi migration and postpone the formation of continuous Bi layer in front of IMC at the anode interface, Pb and Sb addition on Bi migration in Sn-Bi alloys were investigated under current stressing. 3wt% of Pb was added into Sn-3Bi, and the Bi segregation at the anode side was retarded. It’s supposed that the reaction of Pb and Bi atoms to form Pb-Bi IMC inhibited Bi migration in Sn phase. Different contents of Sb (1wt%,3wt%,5wt%) were alloyed with eutectic Sn-Bi solder, and the migration rate of Bi to the anode interface decreased with Sb content until it reached 3wt%, at which Bi migration rate was 57% of that in eutectic Sn-Bi solder. In addition of solder microstructure was affected by current stressing at the interface, the microstructure solder/substrate interface was also affected by the current stressing. The growth of Ni-Sn IMC and P-rich layer at the anode and cathode interface was investigated in the Sn/Ni-P interconnects under current stressing. The thickness of Ni-Sn IMC increased at the anode side and decreased at the cathode side. For the P-rich layer, the thickness increased at both the cathode and anode sides, but the growth rate was faster at the cathode than that at the anode. Current stressing promoted the growth of columnar Ni12P5 layer at the cathode side, while enhanced the growth of the non-cloumunar Ni12P5 layer at the anode side.
页数147
语种中文
文献类型学位论文
条目标识符http://ir.imr.ac.cn/handle/321006/17160
专题中国科学院金属研究所
推荐引用方式
GB/T 7714
杨启亮. 电迁移导致SnBi焊料互连结构中的界面转变:溶质偏析及其抑制和金属间化合物的形成[D]. 金属研究所. 中国科学院金属研究所,2009.
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