A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler

doi:10.1038/s41377-022-00734-7

IMR OpenIR

	A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler
	Zhang, Tongyao 1,2; Wang, Hanwen 3,4; Xia, Xiuxin 3,4; Yan, Ning 1,2; Sha, Xuanzhe 1,2; Huang, Jinqiang 3,4; Watanabe, Kenji 5; Taniguchi, Takashi 6; Zhu, Mengjian 7; Wang, Lei 8; Gao, Jiantou 8,9; Liang, Xilong 2,10; Qin, Chengbing 2,10; Xiao, Liantuan 2,10; Sun, Dongming 3,4; Zhang, Jing 1,2; Han, Zheng 1,2; Li, Xiaoxi 1,2
通讯作者	Gao, Jiantou(gaojiantou@ime.ac.cn) ; Qin, Chengbing(chbqin@sxu.edu.cn) ; Han, Zheng(vitto.han@gmail.com) ; Li, Xiaoxi(xiaoxili1987@gmail.com)
	2022-03-01
发表期刊	LIGHT-SCIENCE & APPLICATIONS
ISSN	2047-7538
卷号	11 期号:1 页码:10
摘要	The nano-opto-electro-mechanical systems (NOEMS) are a class of hybrid solid devices that hold promises in both classical and quantum manipulations of the interplay between one or more degrees of freedom in optical, electrical and mechanical modes. To date, studies of NOEMS using van der Waals (vdW) heterostructures are very limited, although vdW materials are known for emerging phenomena such as spin, valley, and topological physics. Here, we devise a universal method to easily and robustly fabricate vdW heterostructures into an architecture that hosts opto-electro-mechanical couplings in one single device. We demonstrated several functionalities, including nano-mechanical resonator, vacuum channel diodes, and ultrafast thermo-radiator, using monolithically sculpted graphene NOEMS as a platform. Optical readout of electric and magnetic field tuning of mechanical resonance in a CrOCl/graphene vdW NOEMS is further demonstrated. Our results suggest that the introduction of the vdW heterostructure into the NOEMS family will be of particular potential for the development of novel lab-on-a-chip systems.
资助者	National Key R&D Program of China ; National Natural Science Foundation of China (NSFC) ; Key Research Program of Frontier Sciences, CAS ; Joint Research Fund of Liaoning-Shenyang National Laboratory for Materials Science ; Strategic Priority Research Program of Chinese Academy of Sciences ; Key Research Program of Frontier Sciences of the Chinese Academy of Sciences ; Liaoning Revitalization Talents Program
DOI	10.1038/s41377-022-00734-7
收录类别	SCI
语种	英语
资助项目	National Key R&D Program of China[2019YFA0307800] ; National Key R&D Program of China[2017YFA0304203] ; National Key R&D Program of China[2018YFA0306900] ; National Natural Science Foundation of China (NSFC)[12004389] ; National Natural Science Foundation of China (NSFC)[11974357] ; National Natural Science Foundation of China (NSFC)[U1932151] ; National Natural Science Foundation of China (NSFC)[12174444] ; Key Research Program of Frontier Sciences, CAS[ZDBS-LY-JSC015] ; Joint Research Fund of Liaoning-Shenyang National Laboratory for Materials Science[2019JH3/30100031] ; Strategic Priority Research Program of Chinese Academy of Sciences[XDB30000000] ; Key Research Program of Frontier Sciences of the Chinese Academy of Sciences[ZDBS-LY-JSC027] ; Key Research Program of Frontier Sciences of the Chinese Academy of Sciences[QYZDB-SSW-SLH031] ; Liaoning Revitalization Talents Program[XLYC1807109]
WOS研究方向	Optics
WOS类目	Optics
WOS记录号	WOS:000762740800001
出版者	SPRINGERNATURE
引用统计	被引频次：5[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/173163
专题	中国科学院金属研究所
通讯作者	Gao, Jiantou; Qin, Chengbing; Han, Zheng; Li, Xiaoxi
作者单位	1.Shanxi Univ, Inst Optoelect, State Key Lab Quantum Opt & Quantum Opt Devices, Taiyuan 030006, Peoples R China 2.Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 030006, Peoples R China 3.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China 4.Univ Sci & Technol China, Sch Mat Sci & Engn, Hefei 230026, Anhui, Peoples R China 5.Natl Inst Mat Sci, Res Ctr Funct Mat, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan 6.Natl Inst Mat Sci, Int Ctr Mat Nanoarchitecton, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan 7.Natl Univ Def Technol, Coll Adv Interdisciplinary Studies, Changsha 410073, Peoples R China 8.Chinese Acad Sci, Inst Microelect, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China 9.Univ Chinese Acad Sci, Beijing 100029, Peoples R China 10.Shanxi Univ, Inst Laser Spect, State Key Lab Quantum Opt & Quantum Opt Devices, Taiyuan 030006, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Tongyao,Wang, Hanwen,Xia, Xiuxin,et al. A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler[J]. LIGHT-SCIENCE & APPLICATIONS,2022,11(1):10.
APA	Zhang, Tongyao.,Wang, Hanwen.,Xia, Xiuxin.,Yan, Ning.,Sha, Xuanzhe.,...&Li, Xiaoxi.(2022).A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler.LIGHT-SCIENCE & APPLICATIONS,11(1),10.
MLA	Zhang, Tongyao,et al."A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler".LIGHT-SCIENCE & APPLICATIONS 11.1(2022):10.