| A viable approach to prepare 3C-SiC coatings by thermal MOCVD using commercial grade precursors | |
| Liu, Housheng1,2; Tariq, Naeem ul Haq3; Jing, Weichen1,2; Cui, Xinyu1; Tang, Mingqiang1; Xiong, Tianying1 | |
| Corresponding Author | Tang, Mingqiang(mqtang@imr.ac.cn) ; Xiong, Tianying(tyxiong@imr.ac.cn) |
| 2022-09-01 | |
| Source Publication | JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
 |
| ISSN | 0955-2219 |
| Volume | 42Issue:11Pages:4456-4464 |
| Abstract | A series of 3 C-SiC coatings were prepared by organometallic chemical vapor deposition (MOCVD) using precursor solution containing a varying proportion of commercial-grade hexamethyldisiloxane (HMDSO) and nhexane. The phase composition, bonding state, and microstructure of 3 C-SiC coatings were studied in detail by grazing incidence X-ray diffraction (GIXRD), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), and scanning electron microscopy (SEM). The microstructure and mechanical properties of the optimal 3 C-SiC coating were characterized by scanning transmission electron microscopy (STEM) and nanoindentation, respectively. Our results revealed that the amount of undesired graphite phase can be significantly reduced in the 3 C-SiC coating by introducing hydrogen gas in the reaction chamber alongside increasing the ratio of HMDSO/nhexane in the precursor mixture. The STEM results revealed that the optimal coating was predominantly composed of nano-crystalline 3 C-SiC grains alongside a small amount of amorphous graphite. The hardness and elastic modulus of the optimal coating were 38.19 GPa and 363.2 GPa, respectively. |
| Keyword | HMDSO MOCVD SiC Thermal reduction |
| Funding Organization | National Key Research and Devel-opment Project |
| DOI | 10.1016/j.jeurceramsoc.2022.04.045 |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | National Key Research and Devel-opment Project[2019YFB2005302] |
| WOS Research Area | Materials Science |
| WOS Subject | Materials Science, Ceramics |
| WOS ID | WOS:000808130400004 |
| Publisher | ELSEVIER SCI LTD |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.imr.ac.cn/handle/321006/174423 |
| Collection | 中国科学院金属研究所 |
| Corresponding Author | Tang, Mingqiang; Xiong, Tianying |
| Affiliation | 1.Chinese Acad Sci, Inst Met Res, Shi Changxu Innovat Ctr Adv Mat, Shenyang 110016, Peoples R China 2.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China 3.Pakistan Inst Engn & Appl Sci, Dept Met & Mat Engn, Islamabad, Pakistan |
| Recommended Citation GB/T 7714 | Liu, Housheng,Tariq, Naeem ul Haq,Jing, Weichen,et al. A viable approach to prepare 3C-SiC coatings by thermal MOCVD using commercial grade precursors[J]. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY,2022,42(11):4456-4464. |
| APA | Liu, Housheng,Tariq, Naeem ul Haq,Jing, Weichen,Cui, Xinyu,Tang, Mingqiang,&Xiong, Tianying.(2022).A viable approach to prepare 3C-SiC coatings by thermal MOCVD using commercial grade precursors.JOURNAL OF THE EUROPEAN CERAMIC SOCIETY,42(11),4456-4464. |
| MLA | Liu, Housheng,et al."A viable approach to prepare 3C-SiC coatings by thermal MOCVD using commercial grade precursors".JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 42.11(2022):4456-4464. |
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