Support compliance: A non-ignorable factor for cantilever sensors for MEMS application

doi:10.1016/j.sna.2022.113867

IMR OpenIR

	Support compliance: A non-ignorable factor for cantilever sensors for MEMS application
	Li, Diao-Feng; Li, Nan; Bai, Chun-Guang; Zhang, Zhi-Qiang; Zhao, Jian
通讯作者	Bai, Chun-Guang(cgbai@imr.ac.cn)
	2022-10-16
发表期刊	SENSORS AND ACTUATORS A-PHYSICAL
ISSN	0924-4247
卷号	346 页码:4
摘要	Support compliance at the fixed end of cantilever beams has significant effects on the measured modulus of elasticity in bending (Eb) and accurate deflection response. Additional deflection caused by support compliance is an easily neglected but an inevitable factor, which results in the large errors of the measured Eb. An effective strategy to design cantilever sensors was proposed by enhancing the loading distance, which not only improve the sensitivity, but also weaken the support compliance effect. In a nutshell, the support compliance effect must be taken into accounted by engineers carefully to improve the accuracy of the measured Eb and deflection response for cantilever sensors which used in MEMS.
关键词	Cantilever beam Support compliance Elastic properties Metallic glass MEMS
资助者	National Key Research and Devel- opment Program of China
DOI	10.1016/j.sna.2022.113867
收录类别	SCI
语种	英语
资助项目	National Key Research and Devel- opment Program of China ; [2017YFB0306201]
WOS研究方向	Engineering ; Instruments & Instrumentation
WOS类目	Engineering, Electrical & Electronic ; Instruments & Instrumentation
WOS记录号	WOS:000876009300005
出版者	ELSEVIER SCIENCE SA
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/176520
专题	中国科学院金属研究所
通讯作者	Bai, Chun-Guang
作者单位	Chinese Acad Sci, Inst Met Res, Shi Changxu Innovat Ctr Adv Mat, 72 Wenhua Rd, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Li, Diao-Feng,Li, Nan,Bai, Chun-Guang,et al. Support compliance: A non-ignorable factor for cantilever sensors for MEMS application[J]. SENSORS AND ACTUATORS A-PHYSICAL,2022,346:4.
APA	Li, Diao-Feng,Li, Nan,Bai, Chun-Guang,Zhang, Zhi-Qiang,&Zhao, Jian.(2022).Support compliance: A non-ignorable factor for cantilever sensors for MEMS application.SENSORS AND ACTUATORS A-PHYSICAL,346,4.
MLA	Li, Diao-Feng,et al."Support compliance: A non-ignorable factor for cantilever sensors for MEMS application".SENSORS AND ACTUATORS A-PHYSICAL 346(2022):4.