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Modulating nanostructures in metals by magneton sputtering
Mao, Pengyan1; Cheng, Zhao2; Yu, Zhi2,3; Zhao, Hui1; Li, Hongda4; Tai, Kaiping2,3
通讯作者Tai, Kaiping(kptai@imr.ac.cn)
2023-05-10
发表期刊MRS COMMUNICATIONS
ISSN2159-6859
页码8
摘要Here, we report an effective nanostructures modulation strategy by W alloying and annealing treatment in Cu films deposited by magnetron sputtering. The as-deposited Cu and Cu-W films exhibit nanograins with comparable grain sizes. After annealing, nanograins in the Cu film are substantially coarsened accompanying with nano-twinned structure formation. While nanograins survive in annealed Cu-W films due to the pinning effect of W atoms on grain boundary migration. By increasing W content and/or annealing temperature, W particles segregation intensifies, and hybrid nanostructures are formed composed of nanoparticles and nanograins. Our findings can provide strategical guidance for fabricating high-performance nanostructured materials.
关键词Thin film Alloy Annealing Nanostructure
资助者Ministry of Science and Technology of China ; National Natural Science Foundation of China ; Science Fund for Distinguished Young Scholars of Liaoning Province ; Postdoctoral Scientific Research Foundation of Shenyang Ligong University ; Doctoral Research Foundation Project of Liaoning Science and Technology Department
DOI10.1557/s43579-023-00366-x
收录类别SCI
语种英语
资助项目Ministry of Science and Technology of China[2017YFA0700702] ; Ministry of Science and Technology of China[2017YFA0700705] ; National Natural Science Foundation of China[52073290] ; National Natural Science Foundation of China[51927803] ; Science Fund for Distinguished Young Scholars of Liaoning Province[2023JH6/100500004] ; Postdoctoral Scientific Research Foundation of Shenyang Ligong University ; Doctoral Research Foundation Project of Liaoning Science and Technology Department[2022-BS-184]
WOS研究方向Materials Science
WOS类目Materials Science, Multidisciplinary
WOS记录号WOS:000985934200001
出版者SPRINGER HEIDELBERG
引用统计
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/177962
专题中国科学院金属研究所
通讯作者Tai, Kaiping
作者单位1.Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Liaoning, Peoples R China
2.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
3.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China
4.Shenyang Ligong Univ, Sch Equipment Engn, Shenyang 110159, Liaoning, Peoples R China
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GB/T 7714
Mao, Pengyan,Cheng, Zhao,Yu, Zhi,et al. Modulating nanostructures in metals by magneton sputtering[J]. MRS COMMUNICATIONS,2023:8.
APA Mao, Pengyan,Cheng, Zhao,Yu, Zhi,Zhao, Hui,Li, Hongda,&Tai, Kaiping.(2023).Modulating nanostructures in metals by magneton sputtering.MRS COMMUNICATIONS,8.
MLA Mao, Pengyan,et al."Modulating nanostructures in metals by magneton sputtering".MRS COMMUNICATIONS (2023):8.
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