Super High-k Unit-Cell-Thick α-CaCr2O4 Crystals

doi:10.1021/acsnano.4c07032

IMR OpenIR

	Super High-k Unit-Cell-Thick α-CaCr₂O₄ Crystals
	Li, Hui 1,2; Xu, Chuan 1,2; Liu, Zhibo 1,2; Zhou, Tianya 1; Tong, Jinmeng 1,2; Wang, Qiang 1,2; Liu, Xuanya 1,2; Jin, Qianqian 3; Cheng, Hui-Ming 1,4; Ren, Wencai 1,2
通讯作者	Ren, Wencai(wcren@imr.ac.cn)
	2024-10-28
发表期刊	ACS NANO
ISSN	1936-0851
卷号	18 期号:45 页码:31014-31020
摘要	High-dielectric-constant (high-k) insulators are indispensable components to integrate semiconductors into metal-oxide-semiconductor field-effect transistors with sub-10 nm channel length, where the equivalent oxide thickness (EOT) of high-k insulator needs to be decreased to subnanometer scale. The traditional insulators, including Al2O3, SiO2, and HfO2, fit well with the existing silicon industry but suffer from serious degeneration of insulating properties, such as large leakage currents caused by high-density borders and interface traps, when their thicknesses are reduced to a few nanometers. Here, we synthesize a high-quality nonlayered ultrathin alpha-CaCr2O4 crystal down to unit-cell thickness (similar to 1.2 nm) by an elements slow-supply chemical vapor deposition (CVD) method. The unit-cell-thick alpha-CaCr2O4 crystals show a super high dielectric constant of 87.34, which is over 20 times higher than that of well-known layered insulator h-BN and corresponds to an EOT below 1 nm. Furthermore, it has a high breaking strength (39 GPa) and excellent stability. This strategy can also be used to fabricate other ultrathin ternary oxides, such as high-k ultrathin FeNb2O6 crystals, demonstrating the universality of the CVD method.
关键词	alpha-CaCr2O4 2Dcrystal unit-cell thickness high-k insulator chemical vapor deposition
资助者	National Natural Science Foundation of China ; National Natural Science Foundation of China ; Key Research Program of Frontier Sciences of the Chinese Academy of Sciences ; LiaoNing Revitalization Talents Program ; Institute of Metal Research, Chinese Academy of Sciences ; Youth Innovation Promotion Association CAS ; Special Projects of the Central Government in Guidance of Local Science and Technology Development ; Guangdong Basic and Applied Basic Research Foundation
DOI	10.1021/acsnano.4c07032
收录类别	SCI
语种	英语
资助项目	National Natural Science Foundation of China[52188101] ; National Natural Science Foundation of China[52122202] ; National Natural Science Foundation of China[52272050] ; National Natural Science Foundation of China[ZDBS-LY-JSC027] ; Key Research Program of Frontier Sciences of the Chinese Academy of Sciences[XLYC2201003] ; LiaoNing Revitalization Talents Program[2019000178] ; Institute of Metal Research, Chinese Academy of Sciences[2021000185] ; Youth Innovation Promotion Association CAS[2024010859-JH6/1006] ; Special Projects of the Central Government in Guidance of Local Science and Technology Development[2020B0301030002] ; Guangdong Basic and Applied Basic Research Foundation
WOS研究方向	Chemistry ; Science & Technology - Other Topics ; Materials Science
WOS类目	Chemistry, Multidisciplinary ; Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
WOS记录号	WOS:001344643600001
出版者	AMER CHEMICAL SOC
引用统计
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/191036
专题	中国科学院金属研究所
通讯作者	Ren, Wencai
作者单位	1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China 2.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China 3.Guangxi Univ Sci & Technol, Ctr Struct Adv Matter, Sch Elect Engn, Liuzhou 545006, Peoples R China 4.Chinese Acad Sci, Inst Technol Carbon Neutral, Shenzhen Inst Adv Technol, Fac Mat Sci & Energy Engn, Shenzhen 518055, Peoples R China
推荐引用方式 GB/T 7714	Li, Hui,Xu, Chuan,Liu, Zhibo,et al. Super High-k Unit-Cell-Thick α-CaCr₂O₄ Crystals[J]. ACS NANO,2024,18(45):31014-31020.
APA	Li, Hui.,Xu, Chuan.,Liu, Zhibo.,Zhou, Tianya.,Tong, Jinmeng.,...&Ren, Wencai.(2024).Super High-k Unit-Cell-Thick α-CaCr₂O₄ Crystals.ACS NANO,18(45),31014-31020.
MLA	Li, Hui,et al."Super High-k Unit-Cell-Thick α-CaCr₂O₄ Crystals".ACS NANO 18.45(2024):31014-31020.